Effects of laser-induced recovery process on conductive property of SnO2:F thin films

Materials Science and Engineering: B

Volumn 176, Issue 2, 2011, Pages 127-131

  Chen, Ming Fei ^a   Lin, Keh Moh ^a   Ho, Yu Sen ^a  

^a NATIONAL CHANGHUA UNIVERSITY OF EDUCATION   (Taiwan)

Author keywords

Beam shaping ; ; Carrier mobility; FTO film; Laser annealing process

Indexed keywords

ANNEALING; CARRIER MOBILITY; CONDUCTIVE FILMS; GRAIN BOUNDARIES; II-VI SEMICONDUCTORS; INDIUM COMPOUNDS; NEODYMIUM LASERS; OXIDE FILMS; THIN FILMS; TIN OXIDES; ZINC OXIDE;

BEAM SHAPING ;; BEAM-SHAPING; CONDUCTIVE PROPERTIES; CRYSTAL QUALITIES; FTO FILM; LASER ANNEALING PROCESS; LASER INDUCED; RECOVERY PROCESS; THIN-FILMS; WORKING TEMPERATURES;

YTTRIUM ALUMINUM GARNET;

EID: 78751581940     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mseb.2010.10.011     Document Type: Article

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