Study on simulation and experiment of array micro Faraday cup ion detector for FAIMS

Science China Technological Sciences

Volumn 53, Issue 12, 2010, Pages 3225-3231

  Tang, Fei ^a   Wang, Xiaohao ^a   Zhang, Liang ^a   Yan, Zilin ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

FAIMS; Faraday cup; ion detector; low current; MEMS

Indexed keywords

ACETONE; ATMOSPHERIC PRESSURE; ATMOSPHERIC STRUCTURE; ELECTRODES; MEMS; REFRACTORY METAL COMPOUNDS;

CONTRAST EXPERIMENT; FAIMS; FARADAY CUPS; FLOW FIELD DISTRIBUTION; HIGH-FIELD ASYMMETRIC WAVEFORM ION MOBILITY SPECTROMETRIES; ION DETECTORS; LOW CURRENTS; SHIELDING ELECTRODES;

IONS;

EID: 78751514637     PISSN: 16747321     EISSN: 18691900     Source Type: Journal    
DOI: 10.1007/s11431-010-4119-9     Document Type: Article

References (16)

1. R. A. Miller G. A. Eiceman E. G. Nazarov, et al. 2000 A novel micro-machined high-field asymmetric waveform-ion mobility spectrometer Sensors and Actuators B 67 3 300 306 10.1016/S0925-4005(00)00535-9
2. R. Guevremont 2004 High-field asymmetric waveform ion mobility spectrometry: A new tool for mass spectrometry J Chromatography A 1058 1-2 3 19
3. F. A. F. Fraga L. M. S. Margato S. T. G. Fetal, et al. 2002 CCD readout of GEM-based neutron detectors Nucl Instrum Meth Phys Res A 478 1-2 357 361 10.1016/S0168-9002(01)01829-0 (Pubitemid 34284083)
4. M. Chiari A. Migliori P. A. Mandò 2002 Measurement of low currents in an external beam set-up Nucl Instrum Meth Phys Res B 188 1-4 162 165 10.1016/S0168-583X(01)01067-9 (Pubitemid 34288183)
5. K. Li E. Q. Xie L. Wang, et al. 2007 Experimental study on high-voltage solar array sustained arc discharge induced by high charging Sci China Ser E-Tech Sci 50 2 213 220 10.1007/s11431-007-0007-3 (Pubitemid 46627120)
6. J. Šafránková Z. Němeček L. Přech, et al. 2008 A new approach to solar wind monitoring Adv Space Res 41 1 153 159 10.1016/j.asr.2007.08.034 (Pubitemid 350166686)
7. R. McCown F. B. Gross 2005 Comparison of two particle charging experiments for testing the JSC Mars-1 Martian regolith simulant against man-made materials IEEE Trans Dielec Elec Insul 12 4 821 826 10.1109/TDEI.2005.1511108 (Pubitemid 41633175)
8. Shi Y G. Application of VUV-ion mobility spectrometry for the analysis of volatile organic compounds (in Chinese). Master Thesis. Dalian: Dalian Institute of Chemical Physics, Chinese Academy of Sciences, 2006. 27-35
9. N. Sillon R. Baptist 2002 Micromachined mass spectrometer Sensors and Actuators B 83 1-3 129 137 10.1016/S0925-4005(01)01070-X (Pubitemid 34232236)
10. D. Kucerovsky Z. Kucerovsky 2003 Analysis of the dynamic Faraday cup J Phys D: Appl Phys 36 19 2407 2416 10.1088/0022-3727/36/19/015
11. S. Wethekam H. Winter 2007 Study on interactions of He atoms and ions with an Al(1 1 1) surface Nucl Instrum Meth Phys Res B 258 1 7 12 10.1016/j.nimb.2006.12.079 (Pubitemid 46560937)
12. J. D. Thomas G. S. Hodges D. G. Seely, et al. 2005 Performance enhancement study of an electrostatic Faraday cup detector Nucl Instrum Meth Phys Res A 536 1-2 11 21 10.1016/j.nima.2004.07.211
13. R. B. Darling A. A. Scheidemann K. N. Bhat, et al. 2002 Micromachined Faraday cup array using deep ion reactive ion etching Sensors and Actuators A 95 2-3 84 93 10.1016/S0924-4247(01)00718-X (Pubitemid 34061296)
14. C. A. Bower K. H. Gilchrist M. R. Lueck, et al. 2007 Microfabrication of fine-pitch high aspect ratio Faraday cup arrays in silicon Sensors and Actuators A 137 2 296 301 10.1016/j.sna.2007.03.022 (Pubitemid 46915492)
15. A. K. Knight R. P. Sperlinea G. M. Hieftje, et al. 2002 The development of a micro-Faraday array for ion detection Intl J Mass Spect 215 1-3 131 139 10.1016/S1387-3806(02)00528-6
16. D. Papanastasiou H. Wollnik G. Rico, et al. 2008 Differential mobility separation of ions using a rectangular asymmetric waveform J Phys Chem A 112 16 3638 3645 10.1021/jp711732c