Laser-induced etching parameters impact on optical properties of the silicon nanostructures

Science China Technological Sciences

Volumn 54, Issue 1, 2011, Pages 58-62

  Ramizy, Asmiet ^a   Hassan, Z ^a   Omar, Khalid ^a  

^a SCHOOL OF PHYSICS   (Malaysia)

Author keywords

laser induced etching; nanostructure; optical properties; porous Si

Indexed keywords

ELECTROLYTES; ETCHING; NANOSTRUCTURES; PHOTOLUMINESCENCE; POROUS SILICON; SEMICONDUCTOR LASERS; SILICON COMPOUNDS; SILICON WAFERS;

DISSOLUTION REACTIONS; ELECTROLYTE CONCENTRATION; ELECTROLYTE SOLUTIONS; LASER POWER DENSITY; LASER-INDUCED ETCHING; PHOTOLUMINESCENCE INTENSITIES; POROUS SI; SILICON NANO STRUCTURES;

OPTICAL PROPERTIES;

EID: 78651472387     PISSN: 16747321     EISSN: 18691900     Source Type: Journal    
DOI: 10.1007/s11431-010-4179-x     Document Type: Article

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