EELS and ELNES studies of nano-scale nitride multilayers deposited by unbalanced magnetron sputtering

Journal of Physics: Conference Series

Volumn 241, Issue , 2010, Pages

  Seabourne, C R ^a   Ross, I M ^b   Rainforth, W M ^b   Scott, A J ^a   Mendis, B G ^c   Eh Hovespian, P Eh ^d  

^a UNIVERSITY OF LEEDS   (United Kingdom)

^b UNIVERSITY OF SHEFFIELD   (United Kingdom)

^c DARESBURY LABORATORY   (United Kingdom)

^d SHEFFIELD HALLAM UNIVERSITY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL ANALYSIS; DENSITY FUNCTIONAL THEORY; DISSOCIATION; ELECTRON ENERGY LEVELS; ELECTRON SCATTERING; ELECTRONS; ENERGY DISSIPATION; NANOTECHNOLOGY; TRANSMISSION ELECTRON MICROSCOPY;

ELECTRON ENERGY LOSS SPECTRUM; ENERGY LOSS NEAR EDGE STRUCTURE; EXPERIMENTAL ANALYSIS; HIGH SPATIAL RESOLUTION; NEAR STOICHIOMETRIC; SCANNING TRANSMISSION ELECTRON MICROSCOPES; SPHERICAL ABERRATIONS; UNBALANCED MAGNETRON SPUTTERING;

ELECTRON ENERGY LOSS SPECTROSCOPY;

EID: 78651068559     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/241/1/012046     Document Type: Conference Paper

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