Low resistance a-SiGe based microbolometer pixel for future smart IR FPA

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7660, Issue , 2010, Pages

  Yon, J J ^a   Nieto, J P ^a   Vandroux, L ^a   Imperinetti, P ^a   Rolland, E ^a   Goudon, V ^a   Vialle, C ^a   Arnaud, A ^a  

^a CEA LETI   (France)

Author keywords

amorphous silicon germanium alloy; IRFPA; microbolometer; uncooled IR detector

Indexed keywords

ADVANCED CMOS; AMORPHOUS SILICON (A-SI); AMORPHOUS SILICON FILM; AMORPHOUS SILICON GERMANIUM; BASIC PARAMETERS; CURRENT CAPABILITY; ELECTRICAL CHARACTERISTIC; FILM RESISTANCE; IR SENSOR; IRFPA; LOW RESISTANCE; MICROBOLOMETER; SI-GE FILMS; SIGE THIN FILM; UN-COOLED IR; UNCOOLED FPAS; UNCOOLED IR DETECTORS; VOLTAGE REQUIREMENT;

AMORPHOUS FILMS; BOLOMETERS; GERMANIUM; GERMANIUM ALLOYS; INFORMATION TECHNOLOGY; INFRARED DETECTORS; INFRARED RADIATION; PIXELS; SEMICONDUCTING SILICON COMPOUNDS; SILICON ALLOYS; TEMPERATURE SENSORS; THIN FILMS;

AMORPHOUS SILICON;

EID: 78650912938     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.850862     Document Type: Conference Paper

References (5)

1. Kruse, P. W., [Uncooled Thermal Imaging Arrays, Systems and Applications], SPIE Press Bellingham, Washington, ISBN 0-8194-4122-8 (2002).
2. Yon, J.J., Mottin, E., Tissot, J.L., "Latest amorphous silicon microbolometer developments at LETI-LIR," Proc. SPIE 6940, 69401W1-W8 (2008)
3. Trouilleau, C., Fièque, B., Noblet, S., Giner, F., Pochic, D., Durand, A., Robert, P., Cortial, S., Vilain, M., Tissot, J.L., Yon, J.J., "High-performance uncooled amorphous silicon TEC less XGA IRFPA with 17 μm pixel-pitch," Proc. SPIE 7298, 72980Q1-Q6 (2009)
4. Yon, J.J., Tissot, J.L., Rothan, F., Vedel, C., Vilain, M., "LETI/LIRs amorphous silicon uncooled microbolometer development," Proc. SPIE 3379, 139-144 (1998).
5. Yon, J.J., Nieto, J.P., Vandroux, L., Imperinetti, P., Rolland, E., Goudon, V., Vialle, C., Arnaud, A., "Low resistance a-SiGe based microbolometer pixel for future smart IR FPA," Proc. OPTRO-2010-Paris Sensors & components, , paper 1842222 (2010).