Large-Area Commercial Pulsed Laser Deposition

Pulsed Laser Deposition of Thin Films: Applications-Led Growth of Functional Materials

Volumn , Issue , 2006, Pages 191-213

  Greer, Jim ^a  

^a PVD Products Inc   (United States)

Author keywords

Commercial systems and commercial components; Deposition rate monitor development and PLD process; Large area commercial pulsed laser deposition

Indexed keywords

EID: 78650871267     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1002/9780470052129.ch9     Document Type: Chapter

References (7)

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2. Chrisey, D. B., and Hubler, G. K. (1994), Pulsed Laser Deposition of Thin Films, Wiley, New York.
3. Develos-Bagarinao, K., Yamasaki, H., Nakagawa, Y., Obara, H., and Yamada, H. (2003), Phys. C 392-396, 1229-1235.
4. Gibbons, B. (2005), private communication, August.
5. Greer, J. A., and Tabat, M. D. (1995a), J. Vac. Sci. Technol. A 13(3), 1175-1181.
6. Greer, J. A., and Tabat, M. D. (1995b), Mat. Res. Soc. Symp. Proc. 338, 151-161.
7. Greer, J. A., Tabat, M. D., and Lu, C. (1997), Nucl. Instrum. Methods Phys. Res. B 121, 357-362.