Future trends for large-area pulsed laser deposition

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 121, Issue 1-4, 1997, Pages 357-362

  Greer, J A ^a   Tabat, M D ^a   Lu, C ^b  

^a PVD Products   (United States)

^b Intelligent Sensor Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FILM GROWTH; LASER APPLICATIONS; LASER BEAM EFFECTS; LASER PULSES;

FILM DEPOSITION RATE; FUTURE TRENDS;

VAPOR DEPOSITION;

EID: 0031546161     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(96)00434-X     Document Type: Article

References (13)

1. J.A. Greer, Final Report, USAF Contract # F3615-95-C-5820.
2. J.A. Greer and M.D. Tabat, Mat. Res. Soc. Symp. Proc. 388 (1996) 151.
3. J.A. Greer and M.D. Tabat, J. Vac. Sci. Technol. A 13 (1995) 1175.
4. C. Lu, J. Vac. Sci. Technol. 12 (1975) 578.
5. C. Lu, J. Lightner and C.A. Gogal, J. Vac. Sci. Technol. 14 (1977) 103.
6. L.L. Chang, L. Esaki, W.E. Howard and R. Ludeke, J. Vac. Sci. Technol. 10 (1973) 11.
7. J.A. Wollam, P.O. Snyder, H. Yao and B. Johs, SPIE 1678 (1992) 246.
8. C. Lu and Y. Guan, J. Vac. Sci. Technol. A 13 (1995) 1797.
9. S.J. Benerofe, C.H. Ahn, M.M. Wang, K.E. Kihistrom, K.B. Do, S.B. Amason, M.M. Fejer, T.H. Geballe, M.R. Beasley and R.H. Hammond, J. Vac. Sci. Technol. B 12 (1994) 1217.
10. J. Greer, in: Pulsed Laser Deposition of Thin Films, eds. D. Chrisey and G. Hubler (Wiley, New York, 1994) p. 293.
11. Laser Focus World (Nov. 1995) p. 13.
12. J.A. Greer and M.D. Tabat, Mater. Res. Soc. Symp. Proc. 341 (1994) 87.
13. S.R. Foltyn, in: Pulsed Laser Deposition of Thin Films, eds. D. Chrisey and G. Hubler (Wiley, New York, 1994) p. 89.