Thickness dependent properties of barium strontium titanate thin-film varactors

Integrated Ferroelectrics

Volumn 112, Issue 1, 2009, Pages 53-59

  Subramanyam, Guru ^a   Patterson, Mark ^a   Leedy, Kevin ^b   Neidhard, Robert ^b   Varanasi, Chakrapani ^c   Zhang, Chenhao ^a   Steinhauer, Gregg ^d  

^a University of Dayton   (United States)

^b AIR FORCE RESEARCH LABORATORY   (United States)

^c UNIVERSITY OF DAYTON RESEARCH INSTITUTE   (United States)

^d Analog Bridge Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BST FILM; BST THIN FILMS; DC BIAS; DIELECTRIC TUNABILITY; LOW LOSS; PULSED LASER; QUALITY FACTORS; RELATIVE DIELECTRIC PERMITTIVITY; TIO; ZERO-BIAS;

BARIUM; BARIUM TITANATE; DIELECTRIC MATERIALS; ELECTRIC FIELDS; PULSED LASER DEPOSITION; STRONTIUM; STRONTIUM TITANATES; VARACTORS;

BARIUM STRONTIUM TITANATE;

EID: 78650868893     PISSN: 10584587     EISSN: 16078489     Source Type: Journal    
DOI: 10.1080/10584587.2009.484687     Document Type: Conference Paper

References (8)

1. G. H. Haertling, Ferroelectric ceramics: History and technology. Journal of the American Ceramic Society 82(4), 797-818 (1999).
2. G. H. Haertling, Ferroelectric thin films for electronic applications. Journal of Vacuum Science and Technology 9(3), 414-420 (1991).
3. A. K. Tagantsev, V. O. Sherman, K. F. Astafiev, J. Venkatesh, and N. Setter, Ferroelectric materials for microwave tunable applications. Journal of Electroceramics 11, 5-66 (2003).
4. C. V. Varanasi, K. D. Leedy, D. H. Tomich, and G. Subramanyam, Large area Ba1-xSrxTiO3 thin films for microwave applications deposited by pulsed laser ablation. Thin Solid Films 517(9), 2878-2881 (March 2, 2009).
5. G. Subramanyam, F. Ahamed, and R. Biggers, A Si MMIC compatible ferroelectric varactor shunt switch for microwave applications. IEEE Microwave and Wireless Components Letters 15(11), 739-741 (2005). (Pubitemid 41756341)
6. G. Subramanyam, F. Ahamed, R. Biggers, R. Neidhard, E. Nykiel, J. Ebel, R. Strawser, K. Stamper, and M. Calcatera, RF performance evaluation of ferroelectric varactor shunt switches. Microwave and Optical Technology Letters 47(4), 370-374 (November 2005). (Pubitemid 41665261)
7. G. Subramanyam, A new method for electrical characterization of ferroelectric thin films at microwave frequencies. Ferroelectrics 356, 445-448 (2007).
8. For information on commercial GaAs varactor diodes, please refer to MCE Metalics, www.metelics.com.