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Volumn 356, Issue 1 PART 2, 2007, Pages 153-157
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A new method for electrical characterization of ferroelectric thin films at microwave frequencies
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Author keywords
Capacitive test structure; Microwave characterization of ferroelectric thin films; Varactor shunt switches
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Indexed keywords
DEVICE STRUCTURES;
ELECTRICAL CHARACTERIZATION;
FEED LINE;
MICROWAVE CHARACTERIZATION;
MICROWAVE CHARACTERIZATION OF FERROELECTRIC THIN FILMS;
PARALLEL PLATES;
S PARAMETERS;
TEST STRUCTURE;
VARACTOR SHUNT SWITCH;
BICMOS TECHNOLOGY;
COPLANAR WAVEGUIDES;
ELECTRIC SWITCHES;
FERROELECTRIC THIN FILMS;
FERROELECTRICITY;
MICROWAVES;
SCATTERING PARAMETERS;
SPECTRUM ANALYZERS;
VARACTORS;
WIRELESS TELECOMMUNICATION SYSTEMS;
FERROELECTRIC FILMS;
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EID: 60249085994
PISSN: 00150193
EISSN: 15635112
Source Type: Journal
DOI: 10.1080/00150190701511823 Document Type: Conference Paper |
Times cited : (4)
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References (9)
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