Measurement of nanopatterned surfaces by real and reciprocal space techniques

Measurement Science Review

Volumn 10, Issue 5, 2010, Pages 153-156

  Siffalovic, P ^a   Vegso, K ^a   Jergel, M ^a   Majkova, E ^a   Keckes, J ^b   Maier, G ^c   Cornejo, M ^d   Ziberi, B ^d   Frost, F ^d   Hasse, B ^e   Wiesmann, J ^e  

^a INSTITUTE OF PHYSICS   (Slovakia)

^b Erich Schmid Institute of Materials Science   (Austria)

^c MATERIALS CENTER LEOBEN FORSCHUNG GMBH   (Austria)

^d Leibniz Institute für Oberfläschenmodifizierung e V   (Germany)

^e Incoatec GmbH ^*  (Germany)

Author keywords

AFM; GISAXS; Ion beam sputtering; Nanostructures

Indexed keywords

EID: 78650631554     PISSN: 13358871     EISSN: None     Source Type: Journal    
DOI: 10.2478/v10048-010-0027-1     Document Type: Article

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