Lumped parameter modelling of the litho cell

Production Planning and Control

Volumn 22, Issue 1, 2011, Pages 41-49

  Kock, A A A ^a,c   Veeger, C P L ^a   Etman, L F P ^a   Lemmen, B ^b,d   Rooda, J E ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b Crolles2 Alliance   (France)

^c GEHO   (Netherlands)

^d ASML   (Netherlands)

Author keywords

aggregate modelling; cycle time; performance analysis; queueing; simulation

Indexed keywords

CYCLE TIME; DELAY DISTRIBUTIONS; FACTORY FLOORS; LUMPED PARAMETER MODELLING; LUMPED PARAMETER MODELS; PERFORMANCE ANALYSIS; QUEUEING; SHOP FLOOR; SIMULATION; SIMULATION MODEL; SIMULATION RESULT; WAFER FAB;

DECISION MAKING; FLOORS; SCANNING;

COMPUTER SIMULATION;

EID: 78650590821     PISSN: 09537287     EISSN: 13665871     Source Type: Journal    
DOI: 10.1080/09537287.2010.490016     Document Type: Article

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