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Volumn 118, Issue 6, 2010, Pages 1136-1139
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The influence of the rotational speed of the polymer SU8 on the thickness of the waveguide layer
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Author keywords
[No Author keywords available]
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Indexed keywords
GLASS;
PHOTOPOLYMERIZATION;
REFRACTIVE INDEX;
SUBSTRATES;
WAVEGUIDE COMPONENTS;
GLASS SUBSTRATES;
PLANAR POLYMERS;
PLANAR WAVEGUIDE STRUCTURES;
ROTATIONAL SPEED;
WAVEGUIDE LAYERS;
OPTICAL WAVEGUIDES;
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EID: 78650439354
PISSN: 05874246
EISSN: 1898794X
Source Type: Journal
DOI: 10.12693/aphyspola.118.1136 Document Type: Article |
Times cited : (11)
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References (16)
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