A study into the formation and characterisation of electroless nickel silicide for laser doped solar cells

Conference Record of the IEEE Photovoltaic Specialists Conference

Volumn , Issue , 2010, Pages 1406-1409

  Karpour, Anahita ^a   Wenham, Stuart R ^a  

^a UNIVERSITY OF NEW SOUTH WALES   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERISATION; CONTACT PADS; ELECTRICAL CHARACTERISTIC; ELECTROLESS NICKEL; METALLISATION; NICKEL SILICIDE; SINTERING CONDITION; SINTERING TEMPERATURES; SPECIFIC CONTACT RESISTIVITY; TEST STRUCTURE; TOTAL RESISTANCE; TRANSMISSION LINE METHODS;

CONTACT RESISTANCE; NICKEL; NICKEL COMPOUNDS; OHMIC CONTACTS; PHOTOVOLTAIC EFFECTS; SILICIDES; SOLAR CELLS;

SINTERING;

EID: 78650216551     PISSN: 01608371     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/PVSC.2010.5614402     Document Type: Conference Paper

References (10)

1. Alshehri, Y.A., Development of a full silicidation (FUSI) process for nickel silicide, in 22nd Annual microelectronic engineering conference. 2004.
2. Hiroshi Iwai, T.O., Shun-ichiro Ohmi, NiSi salicide technology for scaled CMOS. Microelectronic Engineering, 2002. 60(1-2): p. 157-169.
3. Sorab K. Ghandhi, F.L.T. The properties of nickel in silicon. in Proc. of the IEEE. 1969.
4. Huang, F.L., Investigation on the barrier height and inhomogeneity of nickel silicide Schottky. Applied Surface Science, 2006. 252(12): p. 4027-4032.
5. Y.-J. Chang, J.L.E., Diffusion layers and the Schottky-barrier height in nickel silicide-silicon interfaces. Physical Review B, 1983. 28(10): p. 5766-5773.
6. Transene. http://www.transene.com/. 2009 [cited 2009].
7. Guo, J.-H., High efficiency n-type laser-grooved buried contact silicon solar cells, in.
8. Enthone. http://www.enthone.com/. 2009 [cited 2009].
9. A. Karpour, B.S.T., S.R. Wenham, Advanced Electroless Plating of High Efficiency Silicon Solar Cells, in 24th European Photovoltaic Solar Energy Conference. 2009: Hamburg, Germany.
10. A. S. H. van der Heide, A.S., J. H. Bultman, W. C. Sinke, Explanation of high solar cell diode factors by nonuniform contact resistance. Progress in Photovoltaics: Research and Applications, 2004. 13(1): p. 3-16.