Structural and optical properties of silicon by tilted angle evaporation

Surface and Coatings Technology

Volumn 205, Issue SUPPL. 1, 2010, Pages

  Jang, Sung Jun ^a   Song, Young Min ^a   Choi, Hee Ju ^a   Yu, Jae Su ^b   Lee, Yong Tak ^a  

^a Gwangju Institute of Science and Technology (GIST)   (South Korea)

^b Kyung Hee University   (South Korea)

Author keywords

Nanocolumn; RCWA; Silicon; Tilted angle evaporation; TMM

Indexed keywords

EXTINCTION COEFFICIENTS; INCIDENT ANGLES; NANOCOLUMN; POROUS SI; RCWA; RIGOROUS COUPLED WAVE ANALYSIS; SI FILMS; SI SUBSTRATES; SIMULATED RESULTS; STRUCTURAL AND OPTICAL PROPERTIES; THEORETICAL CALCULATIONS; TILTED ANGLE; TMM; VISIBLE-WAVELENGTH RANGE;

EVAPORATION; LIGHT REFRACTION; POROUS SILICON; REFLECTION; REFRACTIVE INDEX; REFRACTOMETERS;

TRANSFER MATRIX METHOD;

EID: 78649929048     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2010.08.131     Document Type: Article

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