Investigation of graded index SiOxNy antireflection coating for silicon solar cell manufacturing

Physica Status Solidi (C) Current Topics in Solid State Physics

Volumn 4, Issue 4, 2007, Pages 1566-1569

  Lipinski M ^a   Kaminski, A ^b   Lelievre J F ^b   Lemiti, M ^b   Fourmond, E ^b   Zieba P ^a  

^a INSTITUTE OF METALLURGY AND MATERIALS SCIENCE   (Poland)

^b UNIVERSITÉ DE LYON   (France)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOUND SEMICONDUCTOR; EXPERT EVALUATION; GRADED-INDEX;

ARSENIC COMPOUNDS; CHLORINE COMPOUNDS; ELECTRIC CONDUCTIVITY; SILICON COMPOUNDS; TECHNOLOGY;

SEMICONDUCTOR MATERIALS;

EID: 42149135912     PISSN: 18626351     EISSN: None     Source Type: Journal    
DOI: 10.1002/pssc.200674143     Document Type: Conference Paper

References (8)

1. J.F. Lelièvre et al., in: Proc. 20th EPSEC, Barcelona, Spain, 2005, pp. 1442-1445.
2. S. Callard, A. Gagnaire, and J. Joseph, J. Vac. Sci. Technol. A 15, 2088 (1997).
3. P.V. Bulkin, P. L. Swart, and B. M. Lacquet, J. Non-Crystall. Solids 187, 484 (1995).
4. G.A. Neuman, J. Non-Crystall. Solids 218, 92 (1997).
5. P. Nubile, Thin Solid Films 342, 257 (1999).
6. A. Mahdjoub and L. Zighed, Thin Solid Films 478, 299 (2005).
7. A. G. Bruggeman, Ann. Phys. (Leipzig) 24, 636 (1935).
8. W. Theiss, Hard- and Software for Optical Spectroscopy, version 2.3, web: www.mtheiss.com