Atomic and mesoscopic scale characterization of semiconductor interfaces by ballistic electron emission microscopy

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 3, 1997, Pages 1351-1357

  Lee, E Y ^a   Bhargava, S ^a   Chin, M A ^a   Narayanamurti, V ^a  

^a University of California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BALLISTIC ELECTRON EMISSION MICROSCOPY; BURIED OBJECTS; ELECTRONIC CHARACTERIZATION; GAAS; HETEROSTRUCTURES; LOW ENERGY ELECTRON MICROSCOPY; LOW ENERGY ELECTRONS; MATERIALS PHYSICS; MESOSCOPIC SCALE; NON DESTRUCTIVE; SEMICONDUCTOR HETEROSTRUCTURES; SEMICONDUCTOR INTERFACES;

BALLISTICS; BALLOONS; CRYSTALS; ELECTRONS; HETEROJUNCTIONS;

ELECTRON EMISSION;

EID: 78649922686     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580588     Document Type: Article

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