Structural properties of sulfur-implanted diamond single crystals

Proceedings of the International Conference on Ion Implantation Technology

Volumn , Issue , 2000, Pages 773-776

  Hasegawa, Masataka ^a   Ogura, Masahiko ^a   Takeuchi, Daisuke ^a   Yamanaka, Sadanori ^a   Watanabe, Hideyuki ^a   Ri, Sung Gi ^a   Kobayashi, Naoto ^a   Okushi, Hideyo ^a  

^a ELECTROTECHNICAL LABORATORY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEPTH PROFILE; DIAMOND CRYSTALS; DIAMOND SINGLE CRYSTALS; DIAMOND SUBSTRATES; DOPANT DISTRIBUTION; HIGH QUALITY; HIGH TEMPERATURE; HOMOEPITAXIAL DIAMOND; HOST LATTICE; IN-VACUUM; ION CHANNELING; LATTICE LOCATIONS; MAXIMUM DISPLACEMENT; MICROWAVE PLASMA-ASSISTED CHEMICAL VAPOR DEPOSITION; PARTICLE INDUCED X-RAY EMISSION; RESIDUAL DAMAGE; SUBSTITUTIONAL FRACTION; SULFUR ATOMS; SULFUR IMPLANTATION;

CHEMICAL VAPOR DEPOSITION; DIAMONDS; HIGH PRESSURE EFFECTS IN SOLIDS; ION BEAMS; ION IMPLANTATION; PLASMA DEPOSITION; SULFUR; SYNTHETIC DIAMONDS;

SINGLE CRYSTALS;

EID: 78649821101     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/.2000.924268     Document Type: Conference Paper

References (14)

1. S.Koizumi, M.Kamo, Y.Sato, H.Ozaki, T.Inuzuka, Appl.Phys.Lett, vol.71, ppl065-1067, 1997.
2. J.F.Prins, Phys.Rev.B, vol.61, pp7191-7194, 2000.
3. R.Kalish, Carbon, vol.37, pp781-785, 1999.
4. I.Sakaguchi, M.N.-Gamo, E.Yasu, H.Haneda, T.Suzuki, T.Ando, Phys.Rev.B, vol.60, ppR2139-R2141, 1999.
5. R.Kalish, A.Reznik. C.Uzan-Saguy, C.Cytermann, Appl.Phys.Lett, vol.76, pp757-759, 2000.
6. M.Hasegawa, D.Takeuchi, S.Yamanaka, M.Ogura, H.Watanabe, N.Kobayashi, H.Okushi, K.Kajimura, JpnJ.Appl.Phys, vol.38, ppL1519-L1522, 1999.
7. H.Watanabe, K.Hayashi, D.Takeuchi, S.Yamanaka, H.Okushi, K.Kajimura, Appl.Phys.Lett, vol.73, pp981- 983, 1998.
8. D.Takeuchi, H.Watanabe, S.Yamanaka, H.Okushi, and K.Kajimura, Phys.Stat.Sol.A, vol.174, pp l0l-115, 1999.
9. R.Kalish, S.Prawer, Nucl.Instrum. & Methods B, vol.106, pp492-499, 1995.
10. J.F.Ziegler, J.P.Biersak, U.Littmark, The Stopping and Range of Ions in Solids. Pergamon, 1985.
11. J.W.Mayer and E.Rimini, Ion Beam Handbook for Material Analysis. Academic Press, 1977.
12. L.C.Feldman, J.W.Mayer, S.T.Picraux, Materials Analysis by Ion Channeling, Academic Press, 1982.
13. J.R.Tesmer, M.Nastasi, J.C.Barbour, C.J.Maggiore, J.W.Mayer, Handbook of Modern Ion Beam Materials Analysis. Materials Research Society, 1995.
14. N.Sahoo, K.C.Mishra, M.Van Rossum, T.P.Das, Hyperfine Interactions, vol.35, pp701-704, 1987.