A simple photolithography method for microfluidic device fabrication using sunlight as UV source

Microfluidics and Nanofluidics

Volumn 9, Issue 6, 2010, Pages 1247-1252

  Ma, Jingyun ^a   Jiang, Lei ^a   Pan, Xiaoyan ^a   Ma, Huipeng ^a   Lin, Bingcheng ^a   Qin, Jianhua ^a  

^a DALIAN INSTITUTE OF CHEMICAL PHYSICS   (China)

Author keywords

Microfabrication; Photolithography; Sunlight photolithography

Indexed keywords

CHIP FABRICATION; ELECTROPHORETIC SEPARATIONS; ENVIRONMENTAL-FRIENDLY; EXPOSURE CONDITIONS; EXPOSURE-TIME; LATERAL STRUCTURES; LOW COSTS; MASS PRODUCTION; MICRO FLUIDIC APPLICATIONS; MICRO-FLUIDIC DEVICES; PNEUMATIC VALVE; STRAIGHT-FORWARD METHOD; SUNLIGHT-PHOTOLITHOGRAPHY; ULTRA-VIOLET; UV EXPOSURE; UV SOURCES;

CELL CULTURE; FLUIDIC DEVICES; MICROANALYSIS; MICROFABRICATION; MICROMACHINING; PHOTORESISTS;

MICROFLUIDICS;

EID: 78649753460     PISSN: 16134982     EISSN: 16134990     Source Type: Journal    
DOI: 10.1007/s10404-010-0630-3     Document Type: Article

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