Thermally tunable polymer microlenses for biological imaging

Journal of Microelectromechanical Systems

Volumn 19, Issue 6, 2010, Pages 1444-1449

  Huang, Xian ^a   Ni, Junhui ^a   Yan, Shengmei ^b   Leduc, Philip R ^c   Yao, Jun ^b   Lin, Qiao ^a  

^a Fu Foundation School of Engineering and Applied Science   (United States)

^b INSTITUTE OF OPTICS AND ELECTRONICS   (China)

^c CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

Biological imaging; indium tin oxide (ITO); microlens; thermal expansion; tunable optics

Indexed keywords

BIOLOGICAL IMAGING; FOCAL LENGTHS; INDIUM TIN OXIDE; INDIUM TIN OXIDE (ITO); MAGNIFICATION FACTORS; MECHANICAL COMPONENTS; MICRO-HEATERS; MICROLENS; POLYDIMETHYLSILOXANE PDMS; POLYMER MICROLENSE; POTENTIAL APPLICATIONS; RADII OF CURVATURE; TEMPERATURE CHANGES; TEMPERATURE-DEPENDENT CHANGES; THERMAL EXPANSION COEFFICIENTS; TUNABILITIES; TUNABLE OPTICS;

FOCUSING; HEATING EQUIPMENT; INDIUM; INDIUM COMPOUNDS; MICROCHANNELS; MICROLENSES; PHOTORESISTS; SILICONES; THERMAL STRESS; TIN; TIN OXIDES;

THERMAL EXPANSION;

EID: 78649676396     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2010.2082499     Document Type: Article

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