Fabrication and normal/shear stress responses of tactile sensors of polymer/Si cantilevers embedded in PDMS and urethane gel elastomers

IEEJ Transactions on Sensors and Micromachines

Volumn 128, Issue 5, 2008, Pages 193-197

  Huang, Yu Ming ^a   Sohgawa, Masayuki ^a   Yamashita, Kaoru ^a,b   Kanashima, Takeshi ^a   Okuyama, Masanori ^a   Noda, Minoru ^a,b   Noma, Haruo ^c  

^a OSAKA UNIVERSITY   (Japan)

^b KYOTO INSTITUTE OF TECHNOLOGY   (Japan)

^c ADVANCED TELECOMMUNICATIONS RESEARCH INSTITUTE INTERNATIONAL   (Japan)

Author keywords

Cantilever; Elastomer; Strain gauge; Tactile sensor

Indexed keywords

LINEAR DEPENDENCE; POLYMER BEAMS; RESISTANCE CHANGE; STRAIN GAUGE; STRESS RESPONSE; TACTILE SENSORS; URETHANE GEL; YOUNG'S MODULUS;

ATOMIC FORCE MICROSCOPY; ELASTOMERS; GELS; MICROCHANNELS; MICROMACHINING; NANOCANTILEVERS; PLASTICS; RUBBER; SHEAR STRESS; SILICONES; STRAIN GAGES; STRENGTH OF MATERIALS;

SENSORS;

EID: 73849141296     PISSN: 13418939     EISSN: 13475525     Source Type: Journal    
DOI: 10.1541/ieejsmas.128.193     Document Type: Article

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