Direct replication of nanostructures from silicon wafers in polymethylpentene by injection molding

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7788, Issue , 2010, Pages

  Bruck, R ^a   Hainberger, R ^a   Heer, R ^a   Kataeva, N ^a   Kock A ^a   Krapf Gunther M ^b   Kaiblinger, K ^b   Pipelka, F ^b   Bilenberg, B ^c  

^a AIT AUSTRIAN INSTITUTE OF TECHNOLOGY   (Austria)

^b Hubertus Goller GmbH   (Austria)

^c NIL TECHNOLOGY APS   (Denmark)

Author keywords

grating couplers; injection molding; nanostructures; polymethylpentene; waveguides

Indexed keywords

FEATURE SIZES; GRATING COUPLERS; HIGH THERMAL STABILITY; INJECTION MOLDING PROCESS; INJECTION MOLDS; LIFE-SCIENCES; MOLD INSERTS; NANOHOLES; OPTICAL COMPONENTS; OPTICAL INTEGRATED DEVICES; OPTICAL TRANSPARENCY; PHOTONIC STRUCTURE; POLYMETHYLPENTENE; SUB-WAVE LENGTH GRATING; TECHNOLOGY PLATFORMS; THERMOPLASTIC POLYMER;

CHEMICAL STABILITY; ION BEAMS; MOLDS; NANOSTRUCTURES; POLYMERS; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; WAVEGUIDES;

INJECTION MOLDING;

EID: 78649593694     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.859817     Document Type: Conference Paper

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