An improvement of the picosecond ultrasonic technique based on a tunable laser: Application to bulk acoustic wave resonator characterizations

Proceedings - IEEE Ultrasonics Symposium

Volumn 1, Issue , 2006, Pages 564-567

  Devos, Arnaud ^a   Emery, Patrick ^b   Caruyer, Grégory ^b   Ancey, Pascal ^b  

^a INSTITUT D ELECTRONIQUE   (France)

^b STMICROELECTRONICS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVE LAYER; BAW RESONATOR; BAW TECHNOLOGY; BULK ACOUSTIC WAVE FILTER; BULK ACOUSTIC WAVE RESONATOR; MASS PRODUCTION; MEASURED PARAMETERS; MEASUREMENT PRECISION; MECHANICAL MEASUREMENTS; NON-CONTACT; NON-DESTRUCTIVE TECHNIQUE; OPTICAL TECHNIQUE; PICOSECOND ULTRASONIC TECHNIQUES; PICOSECOND ULTRASONICS; PRECISE CONTROL; SHORT ACOUSTIC PULSE; TUNABLE LASERS; ULTRASHORT OPTICAL PULSE;

ACOUSTIC WAVES; LASER TUNING; LASERS; MECHANICAL PROPERTIES; MECHANICAL VARIABLES MEASUREMENT; RESONATORS; ULTRASONICS;

ULTRASONIC TESTING;

EID: 78649366961     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2006.149     Document Type: Conference Paper

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