Fabrication of micro-sensors based on a parylene thin-film substrate for monitoring proton exchange membrane fuel cells

2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010

Volumn , Issue , 2010, Pages 102-105

  Lee, Chi Yuan ^a   Chang, Chienliu ^b   Chan, Pin Cheng ^a   Huang, Ren De ^a   Tong, Maing Sao ^a  

^a YUAN ZE UNIVERSITY   (Taiwan)

^b CANON INC   (Japan)

Author keywords

Flexible parylene substrate; MEMS; Micro sensors; PEMFC

Indexed keywords

ACCELERATED DEGRADATION TESTS; FLEXIBLE PARYLENE SUBSTRATE; FUEL CELL DESIGNS; IN-SITU MONITORING; MICROELECTROMECHANICAL SYSTEMS; PARYLENES; PEMFC; VOLTAGE DISTRIBUTION;

COMPOSITE MICROMECHANICS; DEGRADATION; ELECTROCHEMICAL CORROSION; GAS FUEL PURIFICATION; MICROELECTROMECHANICAL DEVICES; MICROSENSORS; PROTONS;

PROTON EXCHANGE MEMBRANE FUEL CELLS (PEMFC);

EID: 78649278145     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2010.5592156     Document Type: Conference Paper

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