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Journal of Applied Physics

Volumn 108, Issue 9, 2010, Pages

Plasma diagnostics for investigating extreme ultraviolet light sources

(3) Yeates, P a White, J b Kennedy, E T a

a DUBLIN CITY UNIVERSITY (Ireland)

b UNIVERSITY COLLEGE DUBLIN (Ireland)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM TARGET; CHARGE STATE; EXTREME ULTRAVIOLET LIGHT SOURCES; HYDRODYNAMIC SIMULATION; ION STATE; ION TEMPERATURE; LINE INTENSITY RATIO; ON-ELECTRON DENSITY; PLASMA TEMPERATURE; SPACE AND TIME; YTTRIUM ALUMINUM GARNET LASER;

EXTREME ULTRAVIOLET LITHOGRAPHY; IONS; LASER PRODUCED PLASMAS; LIGHT SOURCES; PLASMA DIAGNOSTICS; SILICATE MINERALS; ULTRAVIOLET DEVICES; ULTRAVIOLET RADIATION; YTTRIUM;

ALUMINUM;

EID: 78649261134 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.3486220 Document Type: Article

Times cited : (4)

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