A CMOS-MEMS nano-newton force sensor for biomedical applications

2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010

Volumn , Issue , 2010, Pages 177-181

  Haris, Mohd ^a   Qu, Hongwei ^a  

^a Oakland University   (United States)

Author keywords

CMOS MEMS; Deep Reactive Ion Etching (DRIE); Force sensor; Out of plane sensing

Indexed keywords

BIOMEDICAL APPLICATIONS; CAPACITIVE FORCES; CMOS-MEMS; DEEP REACTIVE ION ETCHING; FORCE SENSOR; FRINGE CAPACITANCE; FULLY DIFFERENTIAL; METAL LAYER; OUT-OF-PLANE; POST-CMOS; SENSING CAPACITORS; SENSING ELEMENTS; SENSOR DEPLOYMENT; SINGLE CRYSTAL SILICON; SIO2 REACTIVE ION ETCHING;

ELECTRON BEAM LITHOGRAPHY; FORCE MEASUREMENT; IONS; MICROANALYSIS; MICROFABRICATION; MICROMACHINING; NANOSENSORS; SILICA; SILICON OXIDES;

REACTIVE ION ETCHING;

EID: 78649238572     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2010.5592177     Document Type: Conference Paper

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