Film Bulk Acoustic-wave Resonator (FBAR) based humidity sensor

2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010

Volumn , Issue , 2010, Pages 445-449

  Qiu, Xiaotun ^a   Zhu, Jie ^a   Oiler, Jon ^b   Yu, Cunjiang ^a   Wang, Ziyu ^b   Yu, Hongyu ^a,b  

^a AZ 85281   (United States)

^b ARIZONA STATE UNIVERSITY   (United States)

Author keywords

Film bulk acoustic wave resonator; Frequency shift; Relative humidity; Ultraviolet

Indexed keywords

ADSORBED OXYGEN; FILM BULK ACOUSTIC-WAVE RESONATORS; FREQUENCY SHIFT; HUMIDITY SENSING; MASS LOADING EFFECTS; RELATIVE HUMIDITIES; RELATIVE HUMIDITY; RESONANT FREQUENCIES; TWO STAGE; ULTRAVIOLET; ULTRAVIOLET LIGHTS; WATER LAYERS; WATER MOLECULE; ZNO; ZNO FILMS; ZNO SURFACE;

ATMOSPHERIC HUMIDITY; FREQUENCY SHIFT KEYING; HUMIDITY SENSORS; NATURAL FREQUENCIES; OXYGEN; RESONATORS; ZINC OXIDE;

ACOUSTIC SURFACE WAVE FILTERS;

EID: 78649235101     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2010.5592429     Document Type: Conference Paper

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