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Volumn , Issue , 2010, Pages 445-449

Film Bulk Acoustic-wave Resonator (FBAR) based humidity sensor

Author keywords

Film bulk acoustic wave resonator; Frequency shift; Relative humidity; Ultraviolet

Indexed keywords

ADSORBED OXYGEN; FILM BULK ACOUSTIC-WAVE RESONATORS; FREQUENCY SHIFT; HUMIDITY SENSING; MASS LOADING EFFECTS; RELATIVE HUMIDITIES; RELATIVE HUMIDITY; RESONANT FREQUENCIES; TWO STAGE; ULTRAVIOLET; ULTRAVIOLET LIGHTS; WATER LAYERS; WATER MOLECULE; ZNO; ZNO FILMS; ZNO SURFACE;

EID: 78649235101     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2010.5592429     Document Type: Conference Paper
Times cited : (11)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.