|
Volumn 615 617, Issue , 2009, Pages 493-496
|
Atomistic scale modeling and analysis of sodium enhanced oxidation of silicon carbide
|
Author keywords
Atomistic scale modeling; Density functional theory; Sodium enhanced oxidation
|
Indexed keywords
CARBON CLUSTERS;
COMPUTATION THEORY;
CRYSTAL ATOMIC STRUCTURE;
DENSITY FUNCTIONAL THEORY;
ELECTRIC FIELDS;
OXIDATION;
SILICON CARBIDE;
SILICON OXIDES;
ATOMISTIC SCALE;
COMPUTATIONAL TECHNIQUE;
DEFECT FORMATION;
ELECTRIC FIELD COMPUTATION;
INTERFACE TRAPS;
INVERSION CHANNELS;
OXIDATION RATES;
SODIUM ENHANCED OXIDATIONS;
SODIUM COMPOUNDS;
|
EID: 78149437712
PISSN: 02555476
EISSN: 16629752
Source Type: Book Series
DOI: 10.4028/www.scientific.net/MSF.615-617.493 Document Type: Conference Paper |
Times cited : (2)
|
References (9)
|