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Volumn 615 617, Issue , 2009, Pages 493-496

Atomistic scale modeling and analysis of sodium enhanced oxidation of silicon carbide

Author keywords

Atomistic scale modeling; Density functional theory; Sodium enhanced oxidation

Indexed keywords

CARBON CLUSTERS; COMPUTATION THEORY; CRYSTAL ATOMIC STRUCTURE; DENSITY FUNCTIONAL THEORY; ELECTRIC FIELDS; OXIDATION; SILICON CARBIDE; SILICON OXIDES;

EID: 78149437712     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/MSF.615-617.493     Document Type: Conference Paper
Times cited : (2)

References (9)
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    • F. Devynck, F. Giustino, and A. Pasquarello: Microelectronic Eng., Vol. 80 (2005), p. 38 doi:10.1016/j.mee.2005.04.021. (Pubitemid 40761066)
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    • Devynck, F.1    Giustino, F.2    Pasquarello, A.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.