Growth of carbon nanotubes at temperatures compatible with integrated circuit technologies

Carbon

Volumn 49, Issue 1, 2011, Pages 280-285

  Chen, Guan Yow ^a   Jensen, Ben ^a   Stolojan, Vlad ^b   Silva, S R P ^b  

^a Building 24   (United Kingdom)

^b UNIVERSITY OF SURREY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS COMPATIBLE; DEFECT LEVELS; DIRECT INTEGRATION; ENERGY DELIVERY; INTEGRATED CIRCUIT TECHNOLOGY; LONG-RANGE ORDERING; LOW SUBSTRATE TEMPERATURE; LOW TEMPERATURE GROWTH; MASS MANUFACTURING; NANOMATERIAL; NANOTUBE GROWTH; POTENTIAL APPLICATIONS; RAMAN PEAK; SECOND ORDERS; SENSOR DEVICE; SILICON NANOWIRES; SILICON SUBSTRATES; SYNTHESIS METHOD; SYNTHESIS TEMPERATURES; TOPDOWN;

CARBON NANOTUBES; GRAPHENE; LOW TEMPERATURE PRODUCTION; MANUFACTURE; NANOWIRES; SEMICONDUCTOR DEVICES; SENSORS; SUBSTRATES;

SEMICONDUCTOR GROWTH;

EID: 78049527257     PISSN: 00086223     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.carbon.2010.09.021     Document Type: Article

References (22)

1. ITRS 2008 update, .
2. P. Poncharal, C. Berger, Y. Yi, Z.L. Wang, and W.A. de Heer Room temperature ballistic conduction in carbon nanotubes J Phys Chem B106 47 2002 12104 12118
3. S. Frank, P. Poncharal, W.L. Wang, and W.A. de Heer Carbon nanotube quantum resistors Science 280 5370 1998 1744 1746
4. A. Akturk, N. Goldsman, G. Pennington, and A. Wickenden Terahertz current oscillations in single-walled zigzag carbon nanotubes Phys Rev Lett 98 16 2007 166803-1 166803-4
5. A. Javey, J. Guo, Q. Wang, M. Lundstrom, and H.J. Dai Ballistic carbon nanotube transistors Nature 424 6949 2003 654 657
6. B.O. Boskovic, V. Stolojan, R.U.A. Khan, S. Haq, and S.R.P. Silva Large-area synthesis of carbon nanofibres at room temperature Nat Mat 1 3 2002 165 168
7. S. Hofmann, B. Kleinsorge, C. Ducati, and J. Robertson Controlled low-temperature growth of carbon nanofibres by plasma deposition New J Phys 5 2003 153.1 153.3
8. T.M. Minea, S. Point, A. Granier, and M. Touzeau Room temperature synthesis of carbon nanofibers containing nitrogen by plasma-enhanced chemical vapor deposition Appl Phys Lett 85 2004 1244 1246
9. Y.M. Shyu, and F.C.N. Hong Low-temperature growth and field emission of aligned carbon nanotubes by chemical vapor deposition Mat Chem Phys 72 2 2001 223 227
10. D. Yokoyama, T. Iwasaki, T. Yoshida, H. Kawarada, S. Sato, and T. Hayakushima Low temperature grown carbon nanotube interconnects using inner shells by chemical mechanical polishing Appl Phys Lett 91 2007 263101-1 263101-3
11. Kawabata A, Sato S, Nozue T, Hyakushima T, Norimatsu M, Mishima M, et al. Robustness of CNT via interconnect fabricated by low temperature process over a high-density current. Proceedings of the 2008 IEEE interconnect technology conference; 2008. p. 237-9.
12. M. Cantoro, S. Hofmann, S. Pisana, V. Scardaci, A. Parvez, and C. Ducati Catalytic chemical vapor deposition of single-walled nanotubes at low temperatures Nano Letters 6 6 2006 1107 1112
13. D. Kondo, S. Sato, A. Kawabata, and Y. Awano Selective growth of double- and single-walled carbon nanotubes on a substrate at 590 °C Nanotechnology 19 43 2008 435601 435606
14. J. Robertson, G. Zhong, H. Telg, C. Thomsen, J.H. Warner, and G.A.D. Briggs Appl Phys Lett 93 2008 163111-1 163111-3
15. G.Y. Chen, V. Stolojan, and S.R.P. Silva Top-down heating for low temperature synthesis of carbon nanotubes J Nanosc Nanotech 10 2010 3952 3958
16. R. Lazzari, and I. Simonsen Granfilm: a software for calculating thin-layer dielectric properties and Fresnel Coefficients Thin Solid Films 419 1-2 2002 124 136
17. G.Y. Chen, C.H.P. Poa, S.J. Henley, V. Stolojan, S.R.P. Silva, and S. Haq Deployment of titanium thermal barrier for low temperature carbon nanotube growth Appl Phys Lett 87 2005 253115-1 253115-3
18. H. Daniels, R. Brydson, B. Rand, and A. Brown Investigating carbonization and graphitization using electron energy loss spectroscopy (EELS) in the transmission electron microscope (TEM) Philos Mag 87 27 2007 4073 4092
19. Y. Wang, D.C. Alsmeyer, and R.L. McCreery Raman spectroscopy of carbon materials: structural basis of observed spectra Chem Mater 2 5 1990 557 563
20. E.F. Antunes, A.O. Lobo, E.J. Corat, V.J. Trava-Airoldi, A.A. Martin, and C. Verissimo Comparative study of first and second order Raman spectra of MWCNT at visible and infrared laser excitation Carbon 44 2006 2202 2211
21. W. Li, H. Zhang, C. Wang, Y. Zhang, Li Xu, and K. Zhu Raman characterization of aligned carbon nanotubes produced by thermal decomposition of hydrocarbon vapor Appl Phys Lett 70 1997 2684 2686
22. J. Campos-Delgado, Y.A. Kim, T. Hayashi, A. Morelos-Gómez, M. Hofmann, and H. Muramatsu Thermal stability studies of CVD-grown graphene nanoribbons: defect annealing and loop formation Chem Phys Lett 469 1-3 2009 177 182