A new single-photon avalanche diode in 90nm standard CMOS technology

Optics Express

Volumn 18, Issue 21, 2010, Pages 22158-22166

  Karami, Mohammad Azim ^a   Gersbach, Marek ^b   Yoon, Hyung June ^a   Charbon, Edoardo ^a,b  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

AVALANCHE DIODES; CMOS INTEGRATED CIRCUITS; ELECTRIC FIELDS; FLUORESCENCE; FLUORESCENCE SPECTROSCOPY; IMPACT IONIZATION; JITTER; METALLIC COMPOUNDS; MOS DEVICES; NANOTECHNOLOGY; PARTICLE BEAMS; PHOTONS; SEMICONDUCTOR DIODES; SILICON ON INSULATOR TECHNOLOGY; STANDARDS;

3-D VISION; AFTERPULSING; COMPLEMENTARY METAL-OXIDE-SEMICONDUCTOR TECHNOLOGIES; CRITICAL VALUE; DARK COUNT RATE; DEAD TIME; EDGE BREAKDOWN; FLUORESCENCE CORRELATION SPECTROSCOPY; FLUORESCENCE LIFETIME IMAGING MICROSCOPY; GUARD RING DESIGN; GUARD-RINGS; PHOTON DETECTION; ROOM TEMPERATURE; SINGLE PHOTON AVALANCHE DIODE; STANDARD CMOS TECHNOLOGY; SYSTEMATIC STUDY; TIME OF FLIGHT; TIME-RESOLVED;

BIAS VOLTAGE;

ALGORITHM; ARTICLE; COMPUTER SIMULATION; ELECTROMAGNETIC FIELD; FLUORESCENCE MICROSCOPY; METHODOLOGY; OPTICS; PHOTON; REPRODUCIBILITY; SEMICONDUCTOR; THREE DIMENSIONAL IMAGING; X RAY;

ALGORITHMS; COMPUTER SIMULATION; ELECTROMAGNETIC FIELDS; IMAGING, THREE-DIMENSIONAL; MICROSCOPY, FLUORESCENCE; OPTICS AND PHOTONICS; PHOTONS; REPRODUCIBILITY OF RESULTS; SEMICONDUCTORS; X-RAYS;

EID: 78049495598     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.18.022158     Document Type: Article

References (11)

1. S. Takeuchi, J. Kim, Y. Yamamoto, and H. H. Hogue, "Development of a high-quatum efficiency single-photon counting system", Appl. Phys. Lett. 74(8), 1063-1065 (1999).
2. S. Cova, M. Ghioni, A. Lacaita, C. Samori, and F. Zappa, "Avalanche photodiodes and quenching circuits for single-photon detection", Appl. Opt. 35(12), 1956-1976 (1996).
3. C. Niclass, A. Rochas, P. A. Besse, and E. Charbon, "Design and Characterization of a CMOS 3-D Image Sensor Based on Single Photon Avalanche Diodes", J. Solid-State Circuits 40(9), 1847-1854 (2005).
4. C. Niclass, M. Sergio, and E. Charbon, "A single Photon Avalanche Diode Array Fabricated in 0.35μm CMOS and based on an Event-Driven Readout for TCSPC Experiments", Proc. SPIE Optics East (2006).
5. M. Gersbach, J. Richardson, E. Mazaleyart, S. Hardillier, C. Niclass, R. Henderson, L. Grant, and E. Charbon, "A low-noise single-photon detector implemented in a 130nm CMOS imaging process", Solid-State Electron. 53(7), 803-808 (2009).
6. M. A. Karami, M. Gersbach, and E. Charbon, "A New Single-photon Avalanche Diode in 90nm Standard CMOS Technology", SPIE Optics and Photonics, (2010).
7. H. Finkelstein, M. J. Hsu, and S. C. Esener, "STI-Bounded Single-Photon Avalanche Diode in a Deep-Submicrometer CMOS Technology", Electron. Device Lett. 27(11), 887-889 (2006).
8. C. Niclass, M. Gersbach, R. Henderson, L. Grant, and E. Charbon", A Single Photon Avalanche Diode Implemented in 130-nm CMOS Technology", IEEE Sel. Top. Quantum, Electronics. 13(4), 863-869 (2007).
9. D. Stoppa, L. Pancheri, M. Scandiuzzio, L. Gonzo, G.-F. Dalla Betta, and A. Simoni, "A CMOS 3-D Imager Based on Single-Photon Avalanche Diode", IEEE Trans. Circ. Syst. 54(1), 4-12 (2007).
10. A. Rochas, M. Gosch, A. Serov, P. A. Besse, R. S. Popovic, T. Lasser, and R. Rigler, "First Fully Integrated 2D-Array of Single Photon Detectors in Standard CMOS Technology", IEEE. Photon. Tech, 15(7), 963-965 (2003).
11. H. Kwon, M. Kang, B. Park, J. Lee, and S. Park, "The Analysis of Dark Signals in CMOS APS Imagers from the Characterization of Test Structures", IEEE Trans. Electron. Dev. 51(2), 178-184 (2004).