Synthesis and characterization of photopatternable epoxy hybrid materials for the fabrication of thick and thermally stable microstructures with a high aspect ratio

Journal of Applied Polymer Science

Volumn 108, Issue 5, 2008, Pages 3169-3176

  Jung, Kyung Ho ^a   Bae, Byeong Soo ^b  

^a Laboratory of Optical Materials and Coating (LOMC)   (South Korea)

^b Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Lithography; Nanocomposites; Oligomers; Photo polymerization; Polysiloxanes

Indexed keywords

ASPECT RATIO; LITHOGRAPHY; MICROSTRUCTURE; NANOCOMPOSITES; OLIGOMERS; PHOTOPOLYMERIZATION; SILICONES; SYNTHESIS (CHEMICAL); THERMODYNAMIC STABILITY;

CYCLOALIPHATIC-EPOXY OLIGOSILOXANE RESINS; MICROPATTERN SUSTAINED TEMPERATURES; THERMALLY STABLE EPOXY HYBRID MATERIAL;

EPOXY RESINS;

EPOXY RESIN; GEL; MICROSTRUCTURE; SYNTHESIS; THERMAL STABILITY;

EID: 43249097642     PISSN: 00218995     EISSN: 10974628     Source Type: Journal    
DOI: 10.1002/app.27966     Document Type: Article

References (26)

1. Yu, W. X.; Yuan, X. -C.; Ngo, N. Q.; Que, W. X.; Cheong, W. C.; Koudriachov, V. Opt Express 2002, 10, 443.
2. Uddin, M. A.; Chan, H. P.; Chow, K. C. Chem Mater 2004, 16, 4806.
3. Chatzichristid, M.; Raptis, I.; Diakoumakos, C. D.; Glezos, N.; Argitis, P.; Sanopoulon, M. Microelectron Eng 2002, 61, 729.
4. Lee, K.; LaBianca, N.; Rishton, S.; Ohlgharnain, S. Z. J Vac Sci Technol B 1995, 13, 3012.
5. Wang, C. S.; Shieh, J. Y. J Appl Polym Sci 1999, 73, 353.
6. Lorenz, H.; Despont, M.; Fahrni, N.; LaBianca, N.; Renaud, P.; Vettiger, P. J Micromech Microeng 1997, 7, 121.
7. Azoplate Corp. U.S. Pat.3,028,239 (1962).
8. Crivello, J. V.; Song, K. Y.; Ghoshal, R. Chem Mater 2001, 13 1932.
9. Cheng, X.; Guo, L. J.; Fu, P.-F. Adv Mater 2005, 17, 1419.
10. Blanc, D.; Pelissier, S.; Saravanamuttu, K.; Najafi, S. I.; Andrews, M. P. Adv Mater 1999, 11, 1508.
11. Kim, J. K.; Kang, D. J.; Bae, B. S. Adv Funct Mater 2005, 15, 1870.
12. Kang, D. J.; Kim, W. S.; Bae, B. S. Appl Phys Lett 2005, 87, 221106.
13. Bae, B. S.; Park, O. H.; Charters, R.; Luther-Davies, B.; Atkins, G. R. J Mater Res 2002, 16, 3184.
14. Chen, Y.-C.; Yen, C.-T.; Chen, W.-C. Polymer 2006, 46, 6959.
15. Brusatin, G.; Giustina, G. D.; Guglielmi, M.; Innocenzi, P. Prog Solid State Chem 2006, 34, 223.
16. Crivello, J. V.; Mao, Z. Chem Mater 1997, 9, 1554.
17. Eo, Y. J.; Lee, T. H.; Kim, S. Y.; Kang, J. K.; Han, Y. S.; Bae, B. S. J Polym Sci Part B: Polym Phys 2005, 43, 827.
18. Decker, C.; Jenkins, A. D. Macromolecules 1985, 18, 1241.
19. Lee, T. Y.; Guymon, C. A.; Jonsson, E. S.; Hoyle, C. E. Polymer 2004, 45, 6155.
20. Lee, T. H.; Kang, E. S.; Bae, B. S. J Sol-Gel Sci Technol 2003, 27, 23.
21. Bulut, U.; Crivello, J. V. Macromolecules 2005, 38, 3584.
22. Innocenzi, P.; Brusatin, G.; Guglielmi, M.; Bertani, R. Chem Mater 1999, 11, 1672.
23. Lee, T. H.; Kim, J. H.; Bae, B. S. J Mater Chem 2006, 1617, 1657.
24. Sepeur, S.; Kunze, N.; Werner, B.; Schmidt, H. Thin Solid Films 1999, 351, 216.
25. Roe, R. J. Methods of X-ray and Neutron Scattering in Polymer Science; Oxford University Press: Oxford, 2000; p 155.
26. Choi, J.; Yee, A. F.; Laine, R. M. Macromolecules 2003, 36, 5666.