Modeling of a micropump membrane with electrostatic actuator

Proceedings - 2nd IEEE International Conference on Advanced Computer Control, ICACC 2010

Volumn 5, Issue , 2010, Pages 630-632

  Li, Liwei ^a   Zhu, Rong ^b   Zhou, Zhaoying ^b   Ren, Jianxing ^a  

^a SHANGHAI UNIVERSITY OF ELECTRIC POWER   (China)

^b TSINGHUA UNIVERSITY   (China)

Author keywords

Electrostatic actuator; Flexible membrane; Modeling; Rayleigh Ritz method; Thin elastic plate theory

Indexed keywords

BENDING MOTION; ELASTIC THEORY; ELECTROSTATIC ACTUATING; FLEXIBLE MEMBRANES; FLUID FLOWING; HARMONIC VIBRATION; MEMS ACTUATORS; MICRO PUMP; MODELING; RAYLEIGH-RITZ METHODS; RESONANCE FREQUENCIES; RITZ METHODS; THEORETICAL FOUNDATIONS; THIN PLATE; THIN-ELASTIC-PLATE THEORY;

ACTUATORS; ELECTROSTATICS; FINITE ELEMENT METHOD; FLEXIBLE STRUCTURES; MEMBRANES; PLATES (STRUCTURAL COMPONENTS); PUMPS; RESONANCE; VARIATIONAL TECHNIQUES;

ELECTROSTATIC ACTUATORS;

EID: 77957949799     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICACC.2010.5486794     Document Type: Conference Paper

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