Micromechatronics and the miniaturization of structures, devices, and systems

IEEE transactions on components, packaging and manufacturing technology. Part C. Manufacturing

Volumn 20, Issue 1, 1997, Pages 31-38

  Friedrich, Craig R ^a   Fang, Ji ^a   Warrington, Robert O ^a  

^a MICHIGAN TECHNOLOGICAL UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELECTROSTATIC DEVICES; INTEGRATED CIRCUIT MANUFACTURE; MICROMACHINING;

ELECTROSTATIC MICROACTUATORS; MICROMECHATRONICS;

MICROELECTROMECHANICAL DEVICES;

EID: 0030649674     PISSN: 10834400     EISSN: None     Source Type: Journal    
DOI: 10.1109/3476.585142     Document Type: Article

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