Alternative mould insert fabrication technology for micromoulding by galvanic replication

Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010

Volumn , Issue , 2010, Pages 278-283

  Wissmann, M ^a   Guttmann, M ^a   Hartmann, M ^a   Hofinann, A ^a   Hummel, B ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ECONOMICAL PRODUCTION; ELECTRICAL DISCHARGE MACHINING; EXPOSURE AREAS; FABRICATION TECHNOLOGIES; FORMING PROCESS; HIGH ASPECT RATIO; HOT-EMBOSSING; INJECTION MOULDING; INTERNATIONAL PARTNERS; JOINING TECHNOLOGY; LASER MANUFACTURING; LASER TECHNOLOGIES; MANUFACTURING CHAIN; MANUFACTURING METHODS; MASS PRODUCTION; MATERIAL COMBINATION; MECHANICAL MANUFACTURING; MICRO AND NANOSTRUCTURES; MICRO-COMPONENTS; MICROINTERFEROMETERS; MICROMOULDING; MICROSTRUCTURE TECHNOLOGY; MULTI MATERIALS; MULTISCALES; NANO SCALE; NANO-STRUCTURED; OPTICAL COMPONENTS; OUT-OF-PLANE; PROCESS RELIABILITY; REPLICATION TECHNIQUES; SIDEWALL ROUGHNESS; STRUCTURE DESIGN; TOOL LIFE;

ASPECT RATIO; DESIGN; ELASTOMERS; ELECTRIC DISCHARGES; ELECTROFORMING; FABRICATION; JOINING; MACHINE TOOLS; MICROOPTICS; MICROSTRUCTURE; MOLDS; PLASTICITY; PRODUCTION ENGINEERING; TECHNOLOGY;

INJECTION MOLDING;

EID: 77957852017     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)

1. Becker, E.W.; Ehrfeld, W.; Hagmann, P.; Maner, A.; Muenchmeyer, D., "Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)", Microelectronic Engineering, 4 (1986) pp. 35-56. (Pubitemid 16587242)
2. Schanz, G.; Bade, K., "Microelectroforming of metals". Microengineering of Metals and Ceramics Part II: Special Replication Techniques, Automation and Properties Weinheim [u.a.]: Wiley-VCH, 2005 pp. 395-420
3. (Advanced Micro and Nanosystems ; Vol.4) ISBN 3-527-31493-8.
4. Piotter, V.; Hanemann, T.; Heckele, M., "Mikroabformung in KunststofI-von der Machbarkeitsstudie zur Vorserienfertigung". Galvanotechnik, 94 (2003) pp. 1738-1745.
5. Heckele, M.; Schomburg, W.K., "Review on micro molding of thermoplastic polymers". Topical review. Journal of Micromechanics and Microengineering, 14 (2004) pp. RI-RI4.
6. Volckaerts, B.; Ottevaere, H.; Vynck, P.; Debaes, C. ; Tuteleers, P.; Hermanne, A.; Veretennicoff, I.; Thienpont, H., "Deep lithography with protons: A generic fabrication technology for refractive micro-optical components and modules", Asian J. Phys. 10 (2001) pp. 195-214. (Pubitemid 36325599)
7. Franc, J.; Destouches, N.; Blanc, D.; Pommier, J.-C.; Tonchev, S.; Van Steenberge, G.; Hendrickx, N.; Last, A.; Parriaux, O., "High-efficiency diffraction grating coupler for multimode optical interconnect", Proc. SPIE 6185 (2006) pp. 435-441. (Pubitemid 44168215)
8. Debaes, C.; Van Erps, J.; Vervaeke, M.; Volckaerts, B.; Ottevaere, H.; Gomez, V.; Vynck, P.; Desmet, L.; Krajewski, R.; Ishii, Y.; Hermanne, A.; Thienpont, H., "Deep proton writing: a rapid prototyping polymer micro-fabrication tool for micro-optical modules", New Journal of Physics, 8 (2006) pp. 270-288. (Pubitemid 44759880)
9. Van Erps, J.; Hendrickx, N.; Debaes, c.; Van Daele, P.; Thienpont, H., "Discrete out-of-plane coupling components for Printed Circuit Board-level optical interconnections", IEEE Photonics Technology Letters, Vol. 19 (2007) pp. 1753-1755.
10. Krajewski, R.; Volckaerts, B.; Meuret, Y.; Kujawinska, M.; Thienpont, H., "Design, modeling, and prototyping of microinterometric tomography system for optical fiber inspection", Proc. SPIE, Vol. 6188, (2006). (Pubitemid 44168334)
11. Van Erps, J.; Wissmann, M.; Guttmann, M.; Hartmann, M.; Mohr, J.; Debaes, C.; Thienpont, H.: "Hot embossing of microoptical components prototyped by deep proton writing", IEEE Photonics Technology Letters, 20 (2008) pp. 1539-41.