Hot embossing of microoptical components prototyped by deep proton writing

IEEE Photonics Technology Letters

Volumn 20, Issue 18, 2008, Pages 1539-1541

  Van Erps, Jürgen ^a   Wissmann, Markus ^b   Guttmann, Markus ^b   Hartmann, Michael ^b   Mohr, Jürgen ^b   Debaes, Christof ^a   Thienpont, Hugo ^a  

^a VRIJE UNIVERSITEIT BRUSSEL   (Belgium)

^b KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

Coupling components; Deep proton writing (DPW); Hot embossing; Mass fabrication; Plastics; Replication

Indexed keywords

COUPLING COMPONENTS; DEEP PROTON WRITING (DPW); HOT EMBOSSING; MASS FABRICATION; REPLICATION;

ELASTOMERS; ELECTROFORMING; PLASTICITY; PLASTICS; POLYMERS; PROTONS; SURFACE PROPERTIES; SURFACE ROUGHNESS;

FABRICATION;

EID: 54049099417     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/LPT.2008.928836     Document Type: Article

References (9)

1. W. S. Beich, "Injection molded polymer optics in the 21st century," Proc. SPIE, vol. 5865, p. 58650J, 2005.
2. M. Heckele and W. K. Schomburg, "Review on micro molding of thermoplastic polymers," J. Micromech. Microeng., vol. 14, pp. R1-R14, 2004.
3. J. Giboz, T. Copponnex, and P. Mélé, "Microinjection molding of thermoplastic polymers: A review," J. Micromech. Microeng., vol. 17, pp. R96-R109, 2007.
4. M. Heckele, W. Bacher, and K. D. Müller, "Hot embossing - The molding technique for plastic microstructures," Microsyst. Technol. vol. 4, pp. 122-124, 1998.
5. C. Debaes et al., "Deep proton writing: A rapid protoyping polymer microfabrication tool for micro-optical modules," New J. Phys., vol. 8, pp. 270-288, 2006.
6. E. W. Becker, W. Erfield, P. Hagmann, A. Maner, and D. Munchmeyer, "Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)," Microelectron. Eng., vol. 4, pp. 35-56, 1986.
7. J. Van Erps, N. Hendrickx, C. Debaes, P. Van Daele, and H. Thienpont, "Discrete out-of-plane coupling components for printed circuit board-level optical interconnections," IEEE Photon. Technol. Lett. vol. 19, no. 21, pp. 1753-1755, Nov. 1, 2007.
8. M. Guttmann, J. Schulz, and V. Saile, "Lithographic fabrication of mold inserts," in Advanced Micro and Nanosystems 3. Microengineering of Metals and Ceramics. Hoboken, NJ: Wiley-VCH Verlag, 2005.
9. G. Van Steenberge, N. Hendrickx, E. Bosman, J. Van Erps, H. Thienpont, and P. Van Daele, "Laser ablation of parallel optical interconnect waveguides," IEEE Photon. Technol. Lett., vol. 18, no. 9, pp. 1106-1108, May 1, 2006.