A high power-handling RF MEMS tunable capacitor using quadruple series capacitor structure

IEEE MTT-S International Microwave Symposium Digest

Volumn , Issue , 2010, Pages 1138-1141

  Yamazaki, Hiroaki ^a   Ikehashi, Tamio ^a   Saito, Tomohiro ^a   Ogawa, Etsuji ^a   Masunaga, Takayuki ^a   Ohguro, Tatsuya ^a   Sugizaki, Yoshiaki ^a   Shibata, Hideki ^a  

^a TOSHIBA CORPORATION   (Japan)

Author keywords

Hot switching; Power handling; RF MEMS; Tunable capacitor

Indexed keywords

ACTUATION VOLTAGES; HANDLING PROPERTIES; HIGH-POWER; HOT-SWITCHING; LOW ACTUATION VOLTAGE; MEASURED RESULTS; MEMS CAPACITORS; METAL INSULATOR METALS; MIM CAPACITORS; POWER-HANDLING; POWER-HANDLING CAPABILITY; PULL-IN VOLTAGE; RF VOLTAGE; RF-MEMS; SERIES CAPACITORS; TUNABLE CAPACITORS;

METAL INSULATOR BOUNDARIES; MIM DEVICES;

CAPACITORS;

EID: 77957802884     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MWSYM.2010.5518281     Document Type: Conference Paper

References (7)

1. G. M. Rebeiz, RF MEMS: Theory, Design, and Technology, Wiley Interscience, 2003.
2. H. J De Los Santos et al, "RF MEMS for Ubiquitous Wireless Connectivity: Part2 - Application," IEEE Microwave Magazine, pp.50-65 December 2004.
3. A. Bezooijen et al, "A GSM/EDGE/WCDMA Adaptive Series-LC Matching Network Using RF-MEMS Switches," IEEE Journal of Solid-State Circuits, vol.43, pp.2259-2268, October 2008.
4. D. Peroulis et al, "RF MEMS Switches With Enhanced Power-Handling Capabilities," IEEE Transactions on Microwave Theory and Techniques, vol.52, pp.59-68, January 2004.
5. Y. Lu et al, "High-Power MEMS Varactors and Impedance Tuners for Millimeter-Wave Applications," IEEE Transactions on Microwave Theory and Techniques, vol.53, pp.3672-3678, November 2005.
6. C. Palego et al, "High power reliability aspects on RF MEMS varactor design," Microelectronics Reliability, vol.46, pp.1705-1710,2006.
7. B. Lakshminarayanan et al, "High-Reliability Miniature RFMEMS Switched Capacitors," IEEE Transactions on Microwave Theory and Techniques, vol.56, pp. 2259-2268, April 2008.