A MEMS Variable capacitor with Piezoresistive Position sensing fabricated in a standard 0.35 μm CMOS process

IEEE MTT-S International Microwave Symposium Digest

Volumn , Issue , 2010, Pages 1154-1157

  Zahirovic, Nino ^a   Mansour, Raafat R ^a   Yu, Ming ^b  

^a UNIVERSITY OF WATERLOO   (Canada)

^b COM DEV International ^*  (Canada)

Author keywords

Piezoresistive devices; RF MEMS; Tunable circuits and devices; Varactors; Variable capacitors and hysteresis

Indexed keywords

CLOSED-LOOP CONTROL; CMOS PROCESSS; CMOS-MEMS; HYSTERESIS EFFECT; MEMS CAPACITORS; MEMS VARIABLE CAPACITORS; PIEZO-RESISTIVE; PIEZORESISTIVE DEVICES; PIEZORESISTIVE POSITION SENSING; PIEZORESISTIVE SENSING; POST PROCESSING; POTENTIAL APPLICATIONS; RF-MEMS; SENSING SCHEMES; TUNABLE CIRCUITS AND DEVICES; VARIABLE CAPACITOR;

BANDPASS FILTERS; CMOS INTEGRATED CIRCUITS; HYSTERESIS; VARACTORS; VARIABLE FREQUENCY OSCILLATORS;

CAPACITORS;

EID: 77957802361     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MWSYM.2010.5516967     Document Type: Conference Paper

References (7)

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