Annealing effects on PECVD-grown Si rich aSiNx thin films

Energy Procedia

Volumn 2, Issue 1, 2010, Pages 159-164

  Esposito, Emilia M ^a   Mercaldo, Lucia V ^a   Veneri, Paola Delli ^a   Lancellotti, Laura ^a   Privato, Carlo ^a  

^a ENEA   (Italy)

Author keywords

Silicon nitride; Silicon quantum dots; Third generation photovoltaics

Indexed keywords

ANNEALING EFFECTS; ANNEALING TEMPERATURES; AS-GROWN; HIGHEST TEMPERATURE; NITRIDE FILMS; OPTICAL ABSORPTION; RAMAN SPECTRA; ROOM-TEMPERATURE PHOTOLUMINESCENCE; SILICON CONTENTS; SILICON NANOCRYSTALS; SILICON QUANTUM DOTS; THERMAL TREATMENT; THIRD GENERATION PHOTOVOLTAICS;

AMORPHOUS FILMS; OPTICAL WAVEGUIDES; PHASE SEPARATION; PHOTOVOLTAIC EFFECTS; RAMAN SPECTROSCOPY; SEMICONDUCTOR QUANTUM DOTS; SILICON NITRIDE; STOICHIOMETRY;

AMORPHOUS SILICON;

EID: 77957791317     PISSN: 18766102     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1016/j.egypro.2010.07.022     Document Type: Conference Paper

References (16)

1. L. Pavesi, L. Dal Negro, C. Mazzoleni, G. Franz, and F. Priolo Nature 408 2000 440 and references therein
2. A.P. Alivisatos Science 271 1996 933
3. G. Conibeer, M. Green, and E.-C. Cho Thin Solid Films 516 2008 6748 6756
4. V. Svrcek, A. Slaoui, and J.-C. Muller Thin Solid Films 451452 2004 384
5. J.-F. Lelievre, H. Rodriguez, J. de la Torre, et al., Proc. 21st European PV Solar Energy Conf., Dresden (2006), p. 1456.
6. L.V. Mercaldo, P. Delli Veneri, E. Esposito, E. Massera, I. Usatii, and C. Privato Mater. Sci. Eng. B 159-160 2009 77
7. E. Dehan, P. Temple-Boyer, R. Henda, J.J. Pedroviejo, and E. Scheid Thin Solid Films 266 1995 14
8. N.-M. Park, C.-J. Choi, T.Y. Seong, and S.-J. Park Phys. Rev. Lett. 86 7 2001 1355
9. F. Giorgis, C. Vinegoni, and L. Pavesi Phys. Rev. B 61 2000 4693
10. M. Molinari, H. Rinnert, and M. Vergnat J. Appl. Phys. 101 2007 123532
11. Z. Yin, and F.W. Smith Phys. Rev. B 42 1990 3658
12. J. Tauc F. Abeles, Optical properties of solids 1970 North Holland Amsterdam
13. E.D. Palik Handbook of Optical Constants of Solids, vol. I 1985
14. Y. Wang, R. Yue, H. Han, and X. Liao J. Non-Cryst. Solids 291 2001 107
15. V.A. Volodin, M.D. Efremov, V.A. Gritsenko, and S.A. Kochubei Appl. Phys. Lett. 73 1998 1212
16. J. Zi, H. Buscher, C. Falter, W. Ludwig, K. Zhang, and X. Xie Appl. Phys. Lett. 69 1996 200