Slow scanning electromagnetic scanner for laser display

Journal of Micro/Nanolithography, MEMS, and MOEMS

Volumn 7, Issue 4, 2008, Pages

  Jeong, Hee Moon ^a   Park, Yong Hwa ^b   Cho, Yong Chul ^b   Hwang, Junsik ^b   Chang, Seok Mo ^a   Kang, Seok Jin ^a   Jeong, Hyun Ku ^a   Kim, Jun O ^a   Lee, Jin Ho ^a  

^a Samsung Advanced Institute of Technology (SAIT)   (South Korea)

^b MEMS and Packaging Group   (South Korea)

Author keywords

Electromagnetic scanner; Laser display; Micromachining; Mobile projection display; Stopper

Indexed keywords

ACTUATORS; COMPOSITE MICROMECHANICS; ELECTROMAGNETISM; FABRICATION; LASER RECORDING; LIGHT MODULATORS; MICROMACHINING; MIRRORS; OPTICAL PROJECTORS; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS;

BASE PLATES; BULK MICROMACHINING TECHNOLOGY; CENTER POINTS; DEVICE SIZES; DRIVING FREQUENCIES; ELECTROMAGNETIC SCANNER; GLASS WAFER; LASER DISPLAY; LOW POWER; MIRROR SIZE; MIRROR SURFACES; MOBILE DISPLAYS; OPTICAL SCANNERS; PACKAGE SIZE; PROJECTION DISPLAYS; SCAN ANGLE; SLOW SCANNING; STOPPER; THERMAL DEFORMATION; VERTICAL LINES; VIDEO IMAGE;

SCANNING;

EID: 77957656025     PISSN: 19325150     EISSN: 19325134     Source Type: Journal    
DOI: 10.1117/1.3033210     Document Type: Conference Paper

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