Design of ideal circular bending actuators for high performance micropumps

Sensors and Actuators, A: Physical

Volumn 163, Issue 1, 2010, Pages 231-239

  Herz, Markus ^a   Horsch, David ^a   Wachutka, Gerhard ^b   Lueth, Tim C ^b   Richter, Martin ^a  

^a Fraunhofer Institute Reliability and Microintegration   (Germany)

^b TECHNICAL UNIVERSITY OF MUNICH   (Germany)

Author keywords

Diaphragm; Hybrid bimorph; Micropump; Modeling; Optimization; Piezoelectric actuator; Unimorph

Indexed keywords

ACTUATOR GEOMETRY; ANALYTICAL AND NUMERICAL METHODS; ANALYTICAL RESULTS; AXISYMMETRIC; BENDING ACTUATORS; CLASSIC LAMINATED PLATE THEORY; CLOSED-FORM EXPRESSION; DIAPHRAGM ACTUATOR; GENERAL APPROACH; GENERIC DESIGN; GEOMETRICAL DIMENSIONS; HYBRID BIMORPH; IDEAL GEOMETRY; MATERIAL PARAMETER; MICRO PUMP; MODELING; NONLINEAR FEM; OPTIMIZATION PROCEDURES; PRESSURE CONDITIONS; RADIAL DISPLACEMENTS; SIMPLE EXPRESSION; STROKE VOLUMES; UNIMORPH; UNIMORPH ACTUATORS;

DESIGN; DIAPHRAGMS; NUMERICAL METHODS; OPTIMIZATION; PIEZOELECTRICITY; PUMPS;

PIEZOELECTRIC ACTUATORS;

EID: 77957655877     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2010.05.018     Document Type: Article

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