Boron diffusion into silicon crystal with SiNx layer as a reaction barrier

Solar Energy Materials and Solar Cells

Volumn 94, Issue 12, 2010, Pages 2187-2190

  Yang, Su Won ^a   Kwan Kim, Young ^a  

^a SolarLight Ltd   (South Korea)

Author keywords

BBr3; n Type silicon; Reaction barrier; SiNx; Solar cell

Indexed keywords

ABSOLUTE VALUES; BBR3; BORON DEPLETION; BORON DIFFUSIONS; CELL CONVERSION EFFICIENCY; N TYPE SILICON; REACTION BARRIERS; SILICON CRYSTAL; SILICON OXIDE LAYERS; SILICON SUBSTRATES; SINX;

BORON; CONVERSION EFFICIENCY; DIFFUSION IN SOLIDS; LITHOGRAPHY; SILICON NITRIDE; SILICON OXIDES; SOLAR CELLS; SUBSTRATES; SURFACE REACTIONS;

DIFFUSION BARRIERS;

EID: 77957655874     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.solmat.2010.07.010     Document Type: Article

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