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Volumn , Issue , 2008, Pages 785-792
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FEM calculation of Microscale Laser Shock Processing on MEMS material with excimer laser
a,b a,b a,b a,b |
Author keywords
Micro Electromechanical Systems; Microscale Laser Shock Processing; Numerical simulation; Residual stress
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Indexed keywords
ABAQUS;
COMPUTER SIMULATION;
CORROSION RESISTANCE;
DESIGN;
EXCIMER LASERS;
FINITE ELEMENT METHOD;
LASER PRODUCED PLASMAS;
MANUFACTURE;
MEMS;
NUMERICAL MODELS;
PLASTIC DEFORMATION;
RESIDUAL STRESSES;
STRESS CORROSION CRACKING;
2D AXISYMMETRIC MODELS;
COMPRESSIVE RESIDUAL STRESS;
LASER INDUCED PLASMA;
LASER SHOCK PROCESSING;
MICRO ELECTROMECHANICAL SYSTEM (MEMS);
MICRO ELECTRO MECHANICAL SYSTEM;
NON-UNIFORM DISTRIBUTION;
RESIDUAL STRESS FIELDS;
LASER MATERIALS PROCESSING;
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EID: 77957345995
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1007/978-1-84800-241-8_79 Document Type: Conference Paper |
Times cited : (5)
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References (9)
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