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Volumn , Issue , 2008, Pages 785-792

FEM calculation of Microscale Laser Shock Processing on MEMS material with excimer laser

Author keywords

Micro Electromechanical Systems; Microscale Laser Shock Processing; Numerical simulation; Residual stress

Indexed keywords

ABAQUS; COMPUTER SIMULATION; CORROSION RESISTANCE; DESIGN; EXCIMER LASERS; FINITE ELEMENT METHOD; LASER PRODUCED PLASMAS; MANUFACTURE; MEMS; NUMERICAL MODELS; PLASTIC DEFORMATION; RESIDUAL STRESSES; STRESS CORROSION CRACKING;

EID: 77957345995     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1007/978-1-84800-241-8_79     Document Type: Conference Paper
Times cited : (5)

References (9)
  • 4
    • 8744294742 scopus 로고    scopus 로고
    • Microscale laser shock peening of thin films, part1: Experiment, modeling and simulation
    • Zhang, W. and Yao, Y.L., Microscale laser shock peening of thin films, part1: experiment, modeling and simulation. ASME Journal of Manufacturing Science and Engineering, 2004,Vol.126(1):10-17
    • (2004) ASME Journal of Manufacturing Science and Engineering , vol.126 , Issue.1 , pp. 10-17
    • Zhang, W.1    Yao, Y.L.2
  • 5
    • 33845380976 scopus 로고
    • Physical study of laser-produced plasma in confined geometry
    • Fabbro, R., Fournier, J., Ballard, P., Devaux, D., and Virmont, J., "Physical Study of Laser-produced Plasma in Confined Geometry" J. Applied Physics, 1990,6(2), pp. 775-784
    • (1990) J. Applied Physics , vol.6 , Issue.2 , pp. 775-784
    • Fabbro, R.1    Fournier, J.2    Ballard, P.3    Devaux, D.4    Virmont, J.5
  • 6
    • 0009705901 scopus 로고    scopus 로고
    • Improvement of laser induced residual stress distributions via shock waves
    • Zhang, W., and Yao, Y. L., 2000, "Improvement of Laser Induced Residual Stress Distributions via Shock Waves," Proc. ICALEO'00, Laser Materials Processing, Vol.89, pp. E183-192
    • (2000) Proc. ICALEO'00, Laser Materials Processing , vol.89
    • Zhang, W.1    Yao, Y.L.2
  • 7
    • 34147117114 scopus 로고    scopus 로고
    • FEM calculation of residual stresses induced by laser shock processing in stainless steels
    • P Peyre, I Chaieb, C Braham, "FEM calculation of residual stresses induced by laser shock processing in stainless steels", Modeling Simul. Mater. Sci. Eng. 15 (2007) 205-221
    • (2007) Modeling Simul. Mater. Sci. Eng. , vol.15 , pp. 205-221
    • Peyre, P.1    Chaieb, I.2    Braham, C.3
  • 9
    • 9644254065 scopus 로고    scopus 로고
    • Modeling schemes, transiency and strain measurement for microscale laser shock processing
    • Hongqiang Chen, Y.L., Modeling Schemes, Transiency and Strain Measurement for Microscale Laser Shock Processing. Journal of Manufacturing Processes,2004, pp.155-169
    • (2004) Journal of Manufacturing Processes , pp. 155-169
    • Chen, H.1    L, Y.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.