Stoichiometric analysis of compositionally graded combinatorial amorphous thin film oxides using laser-induced breakdown spectroscopy

Review of Scientific Instruments

Volumn 81, Issue 7, 2010, Pages

  Widjonarko, N Edwin ^a,b   Perkins, John D ^b   Leisch, Jennifer E ^b   Parilla, Philip A ^b   Curtis, Calvin J ^b   Ginley, David S ^b   Berry, Joseph J ^b  

^a UNIVERSITY OF COLORADO   (United States)

^b NATIONAL RENEWABLE ENERGY LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS THIN FILMS; COMPOSITIONAL MAPPING; ELEMENTAL ANALYSIS; EXPERIMENTAL PARAMETERS; GASEOUS SAMPLES; INDIUM ZINC OXIDES; INDUCTIVELY COUPLED PLASMA ATOMIC EMISSION SPECTROSCOPY; SPECTRAL EMISSION; SPOT SIZES; X RAY FLUORESCENCE; YTTRIUM ALUMINUM GARNET LASER;

AMORPHOUS FILMS; ATOMIC EMISSION SPECTROSCOPY; ATOMIC SPECTROSCOPY; ELECTROMAGNETIC INDUCTION; INDIUM; INDUCTIVELY COUPLED PLASMA; LASER DAMAGE; LIBRARIES; SILICATE MINERALS; STOICHIOMETRY; YTTRIUM; ZINC; ZINC OXIDE;

SPECTRUM ANALYSIS;

EID: 77957141075     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3455218     Document Type: Article

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