Directed self-assembly of cage silsesquioxane containing block copolymers via graphoepitaxy techniques

Journal of Photopolymer Science and Technology

Volumn 23, Issue 2, 2010, Pages 155-159

  Ishida, Yoshihito ^a   Tada, Yasuhiko ^b   Hirai, Tomoyasu ^a   Goseki, Raita ^a   Kakimoto, Masa aki ^a   Yoshida, Hiroshi ^b   Hayakawa, Teruaki ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b HITACHI LTD   (Japan)

Author keywords

Block Copolymer (BCP); Directed self Assembly; Graphoepitaxy; Polyhedral Oligomeric Silsesquioxane (POSS)

Indexed keywords

EID: 77957032539     PISSN: 09149244     EISSN: 13496336     Source Type: Journal    
DOI: 10.2494/photopolymer.23.155     Document Type: Article

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