Miniature cell for total external reflection x-ray fluorescence analysis

Measurement Techniques

Volumn 53, Issue 5, 2010, Pages 510-517

  Egorov, V K ^a   Egorov, E V ^a  

^a INSTITUTE OF MICROELECTRONICS TECHNOLOGY AND HIGH PURITY MATERIALS   (Russian Federation)

Author keywords

microcircuitry; Rutherford ion back scattering; spectroscopy; total external reflection; waveguide resonator; x radiation

Indexed keywords

DRY RESIDUE; EXPERIMENTAL DATA; MICROCIRCUITRY; RUTHERFORD ION BACK-SCATTERING; SURFACE LAYERS; TOTAL EXTERNAL REFLECTION; X RAY FLUORESCENCE ANALYSIS; X-RADIATION; X-RAY WAVEGUIDES;

BACKSCATTERING; FLUORESCENCE; RESONATORS; SPECTROMETRY; WAVEGUIDES; X RAY ANALYSIS;

REFLECTION;

EID: 77956619970     PISSN: 05431972     EISSN: 15738906     Source Type: Journal    
DOI: 10.1007/s11018-010-9535-5     Document Type: Article

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