Evaluating the manufacturing capability of a lithographic area by using a novel vague GERT

Expert Systems with Applications

Volumn 38, Issue 1, 2011, Pages 923-932

  Wang, Chia Nan ^a   Yang, Gino K ^b   Hung, Kuo Chen ^c   Chang, Kuei Hu ^d   Chu, Peter ^e  

^a NATIONAL KAOHSIUNG UNIVERSITY OF APPLIED SCIENCES   (Taiwan)

^b HUNGKUANG UNIVERSITY   (Taiwan)

^c NATIONAL DEFENSE UNIVERSITY   (Taiwan)

^d DEPARTMENT OF PHYSICS   (Taiwan)

^e CENTRAL POLICE UNIVERSITY   (Taiwan)

Author keywords

Fuzzy sets; Graphical evaluation and review technique; Lithographic area; Vague sets

Indexed keywords

300 MM WAFERS; CALCULATION PROCEDURE; FINISHING TIME; GRAPHICAL EVALUATION AND REVIEW TECHNIQUE; LITHOGRAPHIC AREA; MANUFACTURING CAPABILITY; MANUFACTURING PROCEDURE; REPARABILITY; UNCERTAINTY PROBLEMS; VAGUE SETS; WAFER FAB; WAFER MANUFACTURING;

ARTIFICIAL INTELLIGENCE; DECISION SUPPORT SYSTEMS; DECISION THEORY; FUZZY SETS;

MANUFACTURE;

EID: 77956596596     PISSN: 09574174     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.eswa.2010.07.074     Document Type: Article

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