Synthesis and characterization of metal substituted AlxCr 1-x(acetylacetonate)3 single-source precursors for their application to MOCVD of thin films

Polyhedron

Volumn 29, Issue 13, 2010, Pages 2680-2688

  Gairola, Anshita ^a   Kunte, Girish V ^a   Chopra, Deepak ^a   Row, T N Guru ^a   Umarji, A M ^a   Shivashankar, S A ^a  

^a INDIAN INSTITUTE OF SCIENCE   (India)

Author keywords

CVD; Metal organic; Single crystal; Single source precursor

Indexed keywords

CHROMIUM COMPOUNDS; FILM GROWTH; INFRARED SPECTROSCOPY; METAL IONS; METAL SUBSTRATES; METALLORGANIC CHEMICAL VAPOR DEPOSITION; ORGANIC CHEMICALS; ORGANOMETALLICS; SCANNING ELECTRON MICROSCOPY; SYNTHESIS (CHEMICAL); TEMPERATURE; THIN FILMS; ULTRAVIOLET VISIBLE SPECTROSCOPY; X RAY DIFFRACTION;

ACETYLACETONATES; CRYSTALLOGRAPHIC SITES; CVD PROCESS; DISTRIBUTION OF METAL IONS; METALORGANICS; METALS IONS; SINGLE-SOURCE PRECURSOR; SYNTHESIS AND CHARACTERIZATIONS; THIN-FILMS; X- RAY DIFFRACTIONS;

SINGLE CRYSTALS;

EID: 77956181409     PISSN: 02775387     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.poly.2010.06.018     Document Type: Article

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