High-performance MIM capacitors using novel PMNT Thin films

IEEE Electron Device Letters

Volumn 31, Issue 9, 2010, Pages 996-998

  Chen, Wenbin ^a   McCarthy, Kevin G ^b   Mathewson, Alan ^a   Çopuroǧlu, Mehmet ^a   O'Brien, Shane ^a   Winfield, Richard ^a  

^a UNIVERSITY COLLEGE CORK   (Ireland)

^b UNIVERSITY COLLEGE CORK   (Ireland)

Author keywords

Capacitance density; dielectric constant; high ; metalinsulatormetal (MIM) capacitor; Pb(Mg0.33Nb0.67) 0.65Ti0.35O3 (PMNT); thin film devices

Indexed keywords

CANDIDATE MATERIALS; CAPACITANCE DENSITY; DIELECTRIC CONSTANTS; HIGH-CAPACITANCE DENSITY; LOW LOSS; METALINSULATORMETAL (MIM) CAPACITOR; MIM CAPACITORS; PB(MG0.33NB0.67) 0.65TI0.35O3 (PMNT); PMNT THIN FILMS; RADIO FREQUENCIES;

CAPACITANCE; CAPACITORS; LEAD; PERMITTIVITY; THIN FILM DEVICES; THIN FILMS;

MIM DEVICES;

EID: 77956180470     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/LED.2010.2052585     Document Type: Article

References (10)

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