Measurement and modeling of 2D hexagonal resonant-grating filter performance

Journal of the Optical Society of America A: Optics and Image Science, and Vision

Volumn 27, Issue 7, 2010, Pages 1535-1540

  Fehrembach, A L ^a   Gauthier Lafaye, O ^b,c   Yu, K Chan Shin ^b,c   Monmayrant, A ^b,c   Bonnefont, S ^b,c   Daran, E ^b,c   Arguel, P ^b,c   Lozes Dupuy, F ^b,c   Sentenac, A ^a  

^a AIX MARSEILLE UNIVERSITÉ   (France)

^b LAAS CNRS   (France)

^c UNIVERSITÉ DE TOULOUSE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

2D-HEXAGONAL; FILTER PERFORMANCE; GUIDED-MODE RESONANT FILTER; LITHOGRAPHY PROCESS; NEAR INFRARED; NORMAL INCIDENCE; POLARIZATION-INDEPENDENT; Q-FACTORS; STRUCTURAL CHARACTERIZATION;

LITHOGRAPHY;

EID: 77956003609     PISSN: 10847529     EISSN: 15208532     Source Type: Journal    
DOI: 10.1364/JOSAA.27.001535     Document Type: Article

References (21)

1. A. Sharon, D. Rosenblatt, and A. A. Friesem, "Narrow spectral bandwidths with grating waveguide structures", Appl. Phys. Lett. 69, 4154-4156 (1996).
2. A. Sharon, D. Rosenblatt, and A. A. Friesem, "Resonant grating-waveguide structures for visible and near-infrared radiation", J. Opt. Soc. Am. A 14, 2985-2993 (1997).
3. A. L. Fehrembach and A. Sentenac, "Study of waveguide gratings eigenmodes for unpolarized filtering applications", J. Opt. Soc. Am. A 20, 481-488 (2003).
4. D. Lacour, G. Granet, J. P. Plumey, and A. Mure Ravaud, "Polarization independence of a one-dimensional grating in conical mounting", J. Opt. Soc. Am. A 20, 1546-1552 (2003).
5. A. L. Fehrembach and A. Sentenac, "Unpolarized narrowband filtering with resonant gratings", Appl. Phys. Lett. 86, 121105 (2005).
6. A. B. Greenwell, S. Boonruang, and M. G. Moharam, "Multiple wavelength resonant grating filters at oblique incidence with broad angular acceptance", Opt. Express 15, 8626-8638 (2007).
7. G. Niederer, H. P. Herzig, J. Shamir, H. Thiele, M. Schnieper, and C. Zschokke, "Tunable, oblique incidence resonant grating filter for telecommunications", Appl. Opt. 43, 1683-1694 (2004).
8. E. Popov and B. Bozhkov, "Corrugated waveguides as resonance optical filters-advantages and limitations", J. Opt. Soc. Am. A 18, 1758-1764 (2001).
9. P. Song and G. M. Morris, "Experimental demonstration of resonant anomalies in diffraction from two-dimensional gratings", Opt. Lett. 21, 549-551 (1996)
10. A. Fehrembach, A. Talneau, O. Boyko, F. Lemarchand, and A. Sentenac, "Experimental demonstration of a narrowband, angular tolerant, polarization-independent, doubly periodic resonant grating filter", Opt. Lett. 32, 2269-2271 (2007).
11. S. Hernandez, O. Gauthier-Lafaye, A.-L. Fehrembach, S. Bonnefont, P. Arguel, F. Lozes-Dupuy, and A. Sentenac, "High performance 2D resonant grating filter at 850 nm under high oblique incidence of ∼60°", Appl. Phys. Lett. 92, 131112 (2008).
12. E. Grinvald, T. Katchalski, S. Soria, S. Levit, and A. A. Friesem, "Role of photonic bandgaps in polarizationindependent grating waveguide structures", J. Opt. Soc. Am. A 25, 1435-1443 (2008).
13. N. Destouches, J. C. Pommier, O. Parriaux, T. Clausnitzer, N. Lyndin, and S. Tonchev, "Narrow band resonant grating of 100% reflection under normal incidence", Opt. Express 14, 12613-12622 (2006).
14. Z. S. Liu, S. Tibuleac, D. Shin, P. P. Young, and R. Magnusson, "High-efficiency guided-mode resonance filter", Opt. Lett. 23, 1556-1558 (1998).
15. P. S. Priambodo, T. A. Maldonado, and R. Magnusson, "Fabrication and characterization of high-quality waveguidemode resonant optical filters", Appl. Phys. Lett. 83, 3248-3250 (2003).
16. D. Rosenblatt, A. Sharon, and A. A. Friesem, "Resonant grating waveguide structures", IEEE J. Quantum Electron. 33, 2038-2059 (1997).
17. S. Hernandez, O. Bouchard, E. Scheid, E. Daran, L. Jalabert, P. Arguel, S. Bonnefont, O. Gauthier-Lafaye, and F. Lozes-Dupuy, "850 nm wavelength range nanoscale resonant optical filter fabrication using standard microelectronics techniques", Microelectron. Eng. 84, 673-677 (2007).
18. A. L. Fehrembach, D. Maystre, and A. Sentenac, "Phenomenological theory of filtering by resonant dielectric gratings", J. Opt. Soc. Am. A 19, 1136-1144 (2002).
19. L. Li, "New formulation of the Fourier modal method for crossed surface-relief gratings", J. Opt. Soc. Am. A 14, 2758-2767 (1997).
20. A. Talneau, F. Lemarchand, A.-L. Fehrembach, and A. Sentenac, "Impact of electron-beam lithography irregularities across millimeter-scale resonant grating filter performances", Appl. Opt. 49, 658-662 (2010).
21. V. Berger, O. Gauthier-Lafaye, and E. Costard, "Photonic band gaps and holography", J. Appl. Phys. 82, 60-64 (1997).