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Volumn 7, Issue 7-8, 2010, Pages 2033-2035
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Study of unintentional arsenic incorporation into free-standing zincblende GaN and AlGaN layers grown by molecular beam epitaxy on GaAs substrates
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Author keywords
AlGaN; Diffusion; Doping; Electron probe microanalysis; GaN; MBE; SIMS
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Indexed keywords
ALGAN;
DOPING;
ELECTRON PROBE;
GAN;
MBE;
SIMS;
ARSENIC;
CORROSION RESISTANCE;
DIFFUSION;
ELECTRON PROBE MICROANALYSIS;
EPITAXIAL GROWTH;
GALLIUM ARSENIDE;
GALLIUM NITRIDE;
MOLECULAR BEAM EPITAXY;
MOLECULAR BEAMS;
PROBES;
SECONDARY ION MASS SPECTROMETRY;
SEMICONDUCTING GALLIUM;
SEMICONDUCTOR DOPING;
SEMICONDUCTOR GROWTH;
SUBSTRATES;
SURFACE ACTIVE AGENTS;
ZINC;
GALLIUM ALLOYS;
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EID: 77955820264
PISSN: 18626351
EISSN: 16101642
Source Type: Journal
DOI: 10.1002/pssc.200983420 Document Type: Conference Paper |
Times cited : (4)
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References (3)
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