IR permittivities for silicides and doped silicon

Journal of the Optical Society of America B: Optical Physics

Volumn 27, Issue 4, 2010, Pages 730-734

  Cleary, J W ^a   Peale, R E ^a   Shelton, D J ^a   Boreman, G D ^a   Smith, C W ^a   Ishigami, M ^a   Soref, R ^b   Drehman, A ^b   Buchwald, W R ^b  

^a UNIVERSITY OF CENTRAL FLORIDA   (United States)

^b AIR FORCE RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMAGNETIC WAVE POLARIZATION; FILMS; MASS SPECTROMETRY; PALLADIUM; PALLADIUM COMPOUNDS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SECONDARY ION MASS SPECTROMETRY; SEMICONDUCTING SILICON; SILICIDES; SURFACE PLASMON RESONANCE; WAVEGUIDES; X RAY DIFFRACTION;

COMPLEX PERMITTIVITY; FOUR-POINT PROBE MEASUREMENTS; LONG WAVELENGTH; OPTICAL CHARACTERIZATION; P AND N TYPES; RELAXATION FREQUENCY; SURFACE PLASMON-POLARITON WAVEGUIDES; WAVEGUIDE LOSS;

PERMITTIVITY;

EID: 77955667258     PISSN: 07403224     EISSN: None     Source Type: Journal    
DOI: 10.1364/JOSAB.27.000730     Document Type: Article

References (35)

1. M. L. Brongersma and P. G. Kik, Surface Plasmon Nanophotonics (Springer, 2007).
2. S. A. Maier, Plasmonics: Fundamentals and Applications (Springer, 2007).
3. R. R. Musin, Q. Xing, Y. Li, M. Hu, L. Chai, Q. Wang, Y. M. Mikhailova, M. M. Nazarov, A. P. Shkurinov, and A. M. Zheltikov, "Design rules for phase-matched terahertz surface electromagnetic wave generation by optical rectification in a nonlinear planar waveguide," Appl. Opt. 47, 489-494 (2008).
4. C. Sirtori, J. Faist, F. Capasso, D. L. Sivco, A. L. Hutchinson, and A. Y. Cho, "Quantum cascade laser with plasmonenhanced waveguide operating at 8.4μm wavelength," Appl. Phys. Lett. 66, 3242-3244 (1995).
5. A. Boltasseva, T. Nikolajsen, K. Leosson, K. Kjaer, M. S. Larsen, and S. I. Bozhevolnyi, "Integrated optical components utilizing long-range surface plasmon polaritons," J. Lightwave Technol. 23, 413-422 (2005). (Pubitemid 40191743)
6. R. Soref, R. E. Peale, and W. Buchwald, "Longwave plasmonics on doped silicon and silicides," Opt. Express 16, 6507-6514 (2008).
7. A. Sellai, P. G. Mc Cafferty, P. Dawson, S. H. Raza, and H. S. Gamble, "Surface plasmons on PtSi for visible and infrared Schottky barrier enhanced detection," Proc. SPIE 1735, 240-249 (1992).
8. A. Sellai, P. Dawson, W. R. Hendren, S. H. S. Magill, and H. S. Gamble, "Infra-red surface plasmons on platinum silicide," Electron. Lett. 28, 164-165 (1992).
9. J. Cleary, R. E. Peale, D. Shelton, G. Boreman, R. Soref, and W. Buchwald, "Silicides for infrared surface plasmon resonance biosensors," Mater. Res. Soc. Symp. Proc. 1133- AA10-03 (2008).
10. Y. Chen, "Development of mid-infrared surface plasmon resonance-based sensors with highly-doped silicon for biomedical and chemical applications," Opt. Express 17, 3130-3140 (2009).
11. H. Chen and J. Lue, "Ellipsometry measurements of nickel silicides," J. Appl. Phys. 59, 2165-2167 (1986).
12. J. H. Lue, H. Chen, and S. Lew, "Optical constants of palladium silicides measured by a multiple-wavelength ellipsometer," Phys. Rev. B 34, 5438-5442 (1986).
13. H. Bentmann, A. Demkov, R. Gregory, and S. Zollner, "Electronic, optical and surface properties of PtSi thin film," Phys. Rev. B 78, 205302 (2008).
14. J. Lue and S. Mu, "Ellipsometry and structural studies of chromium, molybdenum, and platinum silicides," Phys. Rev. B 36, 1657-1661 (1987).
15. K. Lee and J. T. Lue, "Formation of titanium silicides and their refractive index measurements," Phys. Lett. A 125, 271-275 (1987).
16. J. R. Jimenez, Z. Wu, L. J. Schowaiter, B. D. Hunt, R. W. Fathauer, P. J. Grunthaner, and T. L. Lin, "Optical properties of epitaxial CoSi2 and NiSi2 films on silicon," J. Appl. Phys. 66, 2738-2741 (1989).
17. M. Amiotti, A. Borghesi, G. Guizzetti, and F. Nava, "Optical properties of polycrystalline nickel silicides," Phys. Rev. B 42, 8939-8946 (1990).
18. J. M. Pimbley and W. Katz, "Infrared optical constants of PtSi," Appl. Phys. Lett. 42, 984-986 (1983).
19. W. Henrion and H. Lange, "Optical properties of highrefractory disilicide thin films," Phys. Status Solidi B 151, 375-382 (1989).
20. J. M. Mooney, "Infrared optical absorption of thin PtSi films between 1 and 6μm," J. Appl. Phys. 64, 4664-4667 (1988).
21. M. Amiotti, G. Guizzetti, F. Marabelli, A. Piaggi, V. N. Antonov, Vl. N. Antonov, O. Jepsen, O. K. Andersen, A. Borghesi, F. Nava, V. V. Nemonshkalendo, R. Madar, and A. Rouault, "Optical properties of Pd2Si," Phys. Rev. B 45, 13285-13292 (1992).
22. A. Borghesi, A. Piaggi, G. Guizzetti, F. Levy, M. Tanaka, and H. Fukutani, "Optical properties of single-crystal titanium disilicide," Phys. Rev. B 40, 1611-1615 (1989).
23. M. Tanaka, S. Kurita, M. Fujisawa, and F. Levy, "Dielectric properties of single-crystal TiSi2 from 0.6 to 20 eV," Phys. Rev. B 43, 9133-9137 (1991).
24. S. M. Sze, Physics of Semiconductor Devices (John Wiley & Sons, 1981).
25. L. R. Doolittle, "A semiautomatic algorithm for Rutherford backscattering analysis," Nucl. Instrum. Methods Phys. Res. B 15, 227-231 (1986).
26. H. G. Tompkins and E. A. Irene, Handbook of Ellipsometry (William Andrew, 2005).
27. P. Y. Yu and M. Cardona, Fundamentals of Semiconductors (Springer, 1996).
28. R. Soref, S.-Y. Cho, W. Buchwald, R. E. Peale, and J. Cleary, "Silicon plasmonic waveguides," Chapter 1 in An Introduction to Silicon Photonics, S. Fathpour and B. Jalali, eds. (Taylor and Francis, 2010).
29. H. Raether, Surface Plasmons on Smooth and Rough Surfaces and on Gratings (Springer, 1988).
30. P. B. Johnson, R. W. Christy, "Optical constants of the noble metals," Phys. Rev. B 6, 4370-4379 (1972).
31. M. A. Ordal, R. J. Bell, R. W. Alexander, L. L. Long, and M. R. Querry, "Optical properties of fourteen metals in the infrared and far infrared: Al, Co, Cu, Au, Fe, Pb, Mo, Ni, Pd, Pt, Ag, Ti, V and W," Appl. Opt. 24, 4493-4499 (1985).
32. S. P. Mararka, Silicides for VSLI Applications (Academic, 1983).
33. R. Marani, R. Nava, A. Rouault, R. Madar, and J. P. Senateur, "Crystal growth, charaterisation and resistivity measurements of Pd2Si single crystals," J. Phys.: Condens. Matter 1, 5887-5893 (1989).
34. K. K. Ng, Complete Guide to Semiconductor Devices, 2nd ed. (Wiley, 2002).
35. K. Maex and M. Van Rossum, Properties of Metal Silicides (Short Run Press, 1995).